Abstract
We demonstrate a novel low coherence Michelson interferometer which can provide simultaneous measurement of the refractive index and thickness of transparent plates used as a measured object. Unlike the existing low coherence interferometers reported so far, either an object or a focusing lens aligned on the signal arm is scanned repeatedly by a precise translation stage in synchronization with movement of a reflection mirror on the reference arm. The so-called object or lens scanning method gives us two measured quantities a movement distance of the stage between two light focusing states on the front and rear planes of an object and the corresponding optical path difference. These two measured quantities, result in desirable values of the index and thickness of the object with a short calculation. The measurement accuracy of ≤0.1% is expected for a thickness of more than 1 mm. In the experiment using the object scanning method, the accuracy of 0.3% or less was successfully attained for nearly 1-mm thick plates of fused quartz, sapphire, LiTaO3 and slide glass.
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References
K. Takada, I. Yokohama, K. Chiba and J. Noda: Appl. Opt. 6 (1970) 1603.
R.C. Youngquist, S. Carr and D.E.N. Davis: Opt. Lett. 12 (1987) 158.
H.H. Gilgen, R.P. Nodak and R.P. Salathe: J. Lightwave Technol. 7 (1989) 1225.
A.F. Fercher, K. Mengedoht and W. Werner: Opt. Lett. 13 (1988) 186.
E.A. Swanson, D. Huang, M.R. Hee, J.G. Fujimoto, C.P. Lin and C.A. Puliafito: Opt. Lett. 17 (1992) 151.
C.K. Hitzenberger: Appl. Opt. 31 (1992) 6637.
D. Huang, E.A. Swanson, C.P. Lin, J.S. Schuman, W.G. Stinson, W. Chang, C.A. Puliafito and J.G. Fujimoto: Science 254 (1991) 1178.
W. Drexler, C.K. Hitzenberger, H. Sattmann and A.F. Fercher: Opt. Eng. 34 (1995) 701.
E.A. Swanson, J.A. Izatt, M.R. Hee, D. Huang, C.P. Lin, J.S. Schuman, C.A. Puliafito and J.G. Fujimoto: Opt. Lett. 18 (1993) 1864.
G.J. Tearney, M.E. Brezinski, J.F. Southern, B.E. Bouma, M.R. Hee and J.G. Fujimoto: Opt. Lett. 20 (1995) 2258.
T. Fukano and I. Yamaguchi: Opt. Lett. 21 (1996) 1942.
M. Ohmi, T. Shiraishi, H. Tajiri and M. Haruna: Proc. 11th International Conference on Optical Fiber Sensors, Sapporo, Hokkaido, 1996, p. 332.
K. Kudo: Figures and Tables of the Basic Study of Spectros-copy (Kyoritsu-shuppan, Tokyo, 1972) p. 266 (in Japanese).
T.R. Corle, C.-H. Chou and G.S. Kino: Opt. Lett. 11 (1986) 770.
A. Yariv: Quantum Electronics (John Wiley & Sons, New York, 1987) 3rd ed., p. 92.
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Ohmi, M., Shiraishi, T., Tajiri, H. et al. Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low Coherence Interferometry. OPT REV 4, 507–515 (1997). https://doi.org/10.1007/s10043-997-0507-1
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DOI: https://doi.org/10.1007/s10043-997-0507-1