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Linear image sensor with triangular pixel geometry specialized for the light section method

  • Special Section: Regular Paper
  • The Fourteenth Japan-Finland Joint Symposium on Optics in Engineering (OIE’23), Hamamatsu, Japan
  • Published:
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Abstract

We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.

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Data underlying the results presented in this paper are not publicly available at this time but it can be obtained from the authors upon reasonable request.

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This research received no specific grant from any funding agency in the public, commercial or not-for-profit sectors.

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Authors and Affiliations

  1. Hamamatsu Photonics K. K., 5000, Hirakuchi, Hamana-ku, Hamamatsu, Shizuoka, 434-8601, Japan

    Munenori Takumi, Keisuke Uchida & Katsuhiro Ishii

  2. The Graduate School for the Creation of New Photonics Industries, 1955-1, Kurematsu-cho, Chuo-ku, Hamamatsu, Shizuoka, 431-1202, Japan

    Katsuhiro Ishii

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  1. Munenori Takumi
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  2. Keisuke Uchida
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  3. Katsuhiro Ishii
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Correspondence to Munenori Takumi.

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Takumi, M., Uchida, K. & Ishii, K. Linear image sensor with triangular pixel geometry specialized for the light section method. Opt Rev (2024). https://doi.org/10.1007/s10043-024-00872-w

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