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Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

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Abstract

In this paper, a high-precision accelerometer based on single-level diffraction of a single grating is optimized and improved. The sensor consists of an optical system displacement measurement system using grating interferometry and a mechanical structural part made of silicon. The sensor is analyzed by finite element analysis (FEA) and strictly coupled wave analysis methods. The optical accelerometer has an optical sensitivity of 2.21%/μm over the entire measurement range, and total sensitivity of system is 424%/g (note: 1 g = 9.8 m/s2) with and a cross sensitivity of 3.21%. Furthermore, the first-order resonant frequency is 35.995 Hz and the linear measurement range is ± 0.0177 g. Compared with other low-frequency sensors, a high-performance accelerometer sensor is realized. And can be applied to high-tech fields such as inertial navigation and guidance system, space ocean gravity distribution measurement, and artificial intelligence.

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The data underlying the results presented in this Letter are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Acknowledgements

We would like to acknowledges the support of 2019 Shanxi Provincial Key R&D Program (High-tech Field) Project 98006511. This research was supported by the Innovative Research Group Project of National Science Foundation of China 51821003.

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Author notes

  1. Yu Wang and Kun Huang contributed equally.

Authors and Affiliations

  1. State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan, 030051, China

    Yu Wang, Kun Huang & Lin Cheng

  2. Upgrading Office of Modern College of Humanities and Sciences of Shanxi Normal University, Linfen, 041000, China

    Kun Huang

  3. Key Laboratory of Physical Electronics and Devices of Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an, 710049, China

    Lin Cheng

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  1. Yu Wang
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  2. Kun Huang
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  3. Lin Cheng
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Correspondence to Kun Huang.

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Wang, Y., Huang, K. & Cheng, L. Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating. Opt Rev 30, 17–25 (2023). https://doi.org/10.1007/s10043-022-00777-6

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  • DOI: https://doi.org/10.1007/s10043-022-00777-6

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