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Design method of soft X-ray and vacuum ultraviolet optical system based on plane-symmetric aberration theory

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Abstract

Soft X-ray and vacuum ultraviolet optical system has the imaging performance of plane-symmetric optical system, this paper propose a design method of this kind of optical systems based on the third-order aberration theory of plane-symmetric optical system. First, applying the aberration expressions to calculate all kinds of wave aberrations of every optical element of optical system and building the wave aberration equilibrium equations, and we propose to apply self-adaptive variation probability genetic optimization algorithm to solve them to obtain the initial structure parameters. Second, the evaluation function of imaging performance of optical system is studied and the corresponding expression is given, and then we use the same algorithm discussed in the above for solve the function. Finally, the design method discussed in this paper is applied to design a soft X-ray and vacuum ultraviolet optical system consisting of double elements and its imaging results before and after the optimization are compared and analyzed; and it will verify the effectiveness of the proposed method in this paper. The results show that the design method provides an effective measure for design soft X-ray and vacuum ultraviolet optical system and has a strong practical value.

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Acknowledgements

The authors would like to thank Prof. Lijun Lu from Shanghai University for helpful discussions and useful comments.

Funding

This research was supported by the Project of Natural Science Foundation of Fujian Province of China (2020J01916), the Science and Technology Planning Project of Putian City of China (2020GP004), the Introduction of Talent Research Start-up Fee Project of Putian University of China (2019010).

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Authors and Affiliations

  1. School of Mechanical and Electrical, Information Engineering, Putian University, Putian, 351100, Fujian, China

    Yiqing Cao

  2. Fujian Laser Precision Machining Engineering Technology Research Center, Putian, 351100, Fujian, China

    Yiqing Cao

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  1. Yiqing Cao
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Correspondence to Yiqing Cao.

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Cao, Y. Design method of soft X-ray and vacuum ultraviolet optical system based on plane-symmetric aberration theory. Opt Rev 29, 207–214 (2022). https://doi.org/10.1007/s10043-022-00739-y

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  • DOI: https://doi.org/10.1007/s10043-022-00739-y

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