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InGaAs circular-grating-coupled surface emitting laser with focusing function fabricated by electron beam writing with circular scanning

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Abstract

We report the design, fabrication and operation of an InGaAs QW circular-grating-coupled surface emitting laser (CGCSEL) which can focus the output laser beam. Circular distributed Bragg reflector and circular chirped grating coupler were fabricated by electron beam lithography employing smooth circular scanning and two step reactive ion etching. Single-mode-like lasing at a wavelength of 978.3 nm was accomplished. Focusing function was confirmed and the focused spot size around 80 μm was obtained.

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Authors and Affiliations

  1. Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, Suita, Osaka, 565-0871, Japan

    Ashim Kumar Saha, Masahiro Uemukai & Toshiaki Suhara

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  1. Ashim Kumar Saha
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  2. Masahiro Uemukai
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  3. Toshiaki Suhara
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Saha, A.K., Uemukai, M. & Suhara, T. InGaAs circular-grating-coupled surface emitting laser with focusing function fabricated by electron beam writing with circular scanning. OPT REV 21, 206–209 (2014). https://doi.org/10.1007/s10043-014-0029-6

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  • DOI: https://doi.org/10.1007/s10043-014-0029-6

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