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Electro-optical detection of ZnO-Based unbalanced fabry-perot resonators

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Abstract

Zinc oxide films prepared by magnetron sputtering are introduced to the electro-optical detection to improve the voltage sensitivity. With the help of large piezoelectric effect, ZnO films make up for the deficiency of the low electro-optical coefficient. In this paper, we illustrated the mechanism of piezo-induced enhancements, and measured the electric signals on the line of coplanar waveguides. This method breaks through the limit of material species for optoelectronically responsive sensing, and shows promising applications in optical detection.

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Correspondence to Ai-Wu Li.

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Zhu, F., Yu, YH., Jin, RL. et al. Electro-optical detection of ZnO-Based unbalanced fabry-perot resonators. OPT REV 20, 338–340 (2013). https://doi.org/10.1007/s10043-013-0061-y

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  • DOI: https://doi.org/10.1007/s10043-013-0061-y

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