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Hollow tube fabrication in photoresist film using continuous wave laser

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Abstract

This paper is a study of three-dimensional (3D) micron/submicron fabrication with a continuous wave (CW) laser. The fabrication forms vertical and horizontal hollow tubes in a photoresist film with nonlinear optical properties. We controlled beam intensities and dose amounts to manipulate a reaction time constant of the photoresist; we fabricated the 3D hollows in high contrast.

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Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, Shizuoka University, Hamamatsu, 432-8561, Japan

    Masateru Tomiyasu & Chikara Egami

Authors
  1. Masateru Tomiyasu
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  2. Chikara Egami
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Correspondence to Masateru Tomiyasu.

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Tomiyasu, M., Egami, C. Hollow tube fabrication in photoresist film using continuous wave laser. OPT REV 18, 357–359 (2011). https://doi.org/10.1007/s10043-011-0068-1

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  • DOI: https://doi.org/10.1007/s10043-011-0068-1

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