Abstract
A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10−8 rad.
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Zheng, D., Wang, X. & Sasaki, O. Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement. OPT REV 14, 314–318 (2007). https://doi.org/10.1007/s10043-007-0314-8
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DOI: https://doi.org/10.1007/s10043-007-0314-8