Skip to main content
Log in

Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation

  • OPTICAL SYSTEMS AND TECHNOLOGIES
  • Published:
Optical Review Aims and scope Submit manuscript

Abstract

This paper describes the structure and characteristics of a deflecting mirror using electromagnetic actuation. We used a moving magnet structure for mirror actuation and focused on designing a mirror structure with effective magnetic force (for low-power operation) and a simple fabrication process (to achieve low manufacturing cost). In this design, the magnetic forces of attraction and repulsion are simultaneously used for mirror deflection, allowing the mirror to be operated with low current. Moreover, the structures of the yoke core and magnet bar have been designed to further reduce the operating current. Such a mirror structure is simple and can be easily fabricated with a small number of components. This structure can be used not only for a one-dimensionally deflecting mirror but also for a two-dimensionally deflecting mirror by attaching a second yoke core.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. K. E. Petersen: IBM J. Res. Dev. 24 (1980) 631.

    Article  Google Scholar 

  2. H. Toshiyoshi and H. Fujita: IEEE J. Microelectromech. Syst. 5 (1996) 231.

    Article  Google Scholar 

  3. H. Miyajima, N. Asaoka, M. Arima, Y. Miyamoto, K. Murakami, K. Tokuda and K. Matsumoto: IEEE J. Microelectromech. Syst. 10 (2001) 418.

    Article  Google Scholar 

  4. N. Asada, H. Matsuki, K. Minami and M. Esashi: IEEE Trans. Mag. 30 (1994) 4647.

    Article  ADS  Google Scholar 

  5. Y. Takahashi, T. Takeuchi, G. Reyne and H. Fujita: Proc. Int. Conf. Optical MEMS 2001, 2001, p. 9.

  6. Y. Hidebayashi and Y. Okano: Proc. Int. Conf. Optical MEMS 2001, 2001, p. 137.

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Takayuki Iseki.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Iseki, T., Okumura, M. & Sugawara, T. Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation. OPT REV 13, 189–194 (2006). https://doi.org/10.1007/s10043-006-0189-0

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10043-006-0189-0

Key words

Navigation