Abstract
We fabricated a two-dimensional subwavelength grating (SWG) on a polymethyl methacrylate (PMMA) film using a molding technique. A method of fabricating SWGs with high accuracy using a replica technique in an atmospheric environment was proposed. The SWG consisted of tapered gratings with a 200 nm period and a 200 nm deep groove. The reflectivity at wavelengths from 400 nm to 800 nm was measured and compared with the results calculated on the basis of rigorous coupled-wave analysis. At these wavelengths, the reflectivity decreased to approximately half that of the PMMA film.
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Kanamori, Y., Hane, K. Broadband Antireflection Subwavelength Gratings for Polymethyl Methacrylate Fabricated with Molding Technique. OPT REV 9, 183–185 (2002). https://doi.org/10.1007/s10043-002-0183-0
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DOI: https://doi.org/10.1007/s10043-002-0183-0