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Batch Assembly Micro-Ball Lens Array for Si-Based Optical Coupling Platform in Free Space

  • OPTICAL SYSTEMS AND TECHNOLOGIES
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Abstract

The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer which can improve the appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of a self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purposes. The structure of optical coupling platform is able to improve the distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5 dB with wavelength 635 nm in singlemode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded onto a flat-topped mesa that adjoins to the v-groove. The corner compensation offers a method to fabricate the flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.

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Authors and Affiliations

  1. Department of Engineering and System Science, Tsing Hua University, Hisnchu 101, Section 2, Kuang Fu Road Hsinchu, Taiwan

    Sheng-Chih Shen & Hwai-Pwu Chou

  2. Department of Materials Science and Engineering, Tsing Hua University, Hisnchu 101, Section 2, Kuang Fu Road Hsinchu, Taiwan

    Min-Chieh Chou

  3. Industrial Technology Research Institute, MIRL/ITRIBldg, 22, M400, 195-3 Chung Hsing Rd., Section 4, Chutung, Hsinchu, Taiwan

    Cheng-Tang Pan

Authors
  1. Sheng-Chih Shen
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  2. Cheng-Tang Pan
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  3. Hwai-Pwu Chou
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  4. Min-Chieh Chou
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Corresponding authors

Correspondence to Sheng-Chih Shen or Cheng-Tang Pan.

Additional information

This paper was originally presented at the 2001 International Conference (2nd Joint OSJ-SPIE Conference) on Optical Engineering for Sensing and Nanotechnology, ICOSN 2001 which was held June 6-8, 2001 at the Pacifico-Yokohama Conference Center, Yokohama, Japan.

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Shen, SC., Pan, CT., Chou, HP. et al. Batch Assembly Micro-Ball Lens Array for Si-Based Optical Coupling Platform in Free Space. OPT REV 8, 373–377 (2001). https://doi.org/10.1007/s10043-001-0373-1

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  • DOI: https://doi.org/10.1007/s10043-001-0373-1

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