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Thermo-Optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films

  • PHOTONICS AND OPTOELECTRONICS
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Abstract

A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23#x00B0;C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were #x2212;4.0 #x00D7; 10#x2212;6/#x00B0;C, #x2212;60 #x00D7; 10#x2212;6/#x00B0;C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.

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Author notes

  1. Hiroyasu Kondo & Tetsuya Homma

    Present address: Corporate Manufacturing Engineering Center, Toshiba Corporation, 33, Shin-isogo-cho, Isogo-ku, Yokohama, Kanagawa, 235-0017, Japan

Authors and Affiliations

  1. Postgraduate Course of Electrical Engineering, Shibaura Institute of Technology, 3-9-14, Shibaura, Minato-ku, Tokyo, 108-8548, Japan

    Hiroyasu Kondo & Kazuaki Inohara

  2. Department of Electronic Engineering, Faculty of Engineering, Shibaura Institute of Technology, 3-9-14, Shibaura, Minato-ku, Tokyo, 108-8548, Japan

    Yuki Taniguchi, Junko Nakahata, Tetsuya Homma & Hideo Takahashi

  3. Center for Informative and Environmental Materials, Research Organization for Advanced Engineering, Shibaura Institute of Technology, 3-9-14, Shibaura, Minato-ku, Tokyo, 108-8548, Japan

    Hiroyasu Kondo & Tetsuya Homma

Authors
  1. Hiroyasu Kondo
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  2. Kazuaki Inohara
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  3. Yuki Taniguchi
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  4. Junko Nakahata
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  5. Tetsuya Homma
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  6. Hideo Takahashi
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Correspondence to Tetsuya Homma.

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Kondo, H., Inohara, K., Taniguchi, Y. et al. Thermo-Optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films. OPT REV 8, 323–325 (2001). https://doi.org/10.1007/s10043-001-0323-y

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  • DOI: https://doi.org/10.1007/s10043-001-0323-y

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