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High Precision Testing Method for Fabry-Perot Etalon

  • OPTICAL SYSTEMS AND TECHNOLOGIES
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Abstract

We present a new method for precise measurement of parallelism and relative flatness of a Fabry-Perot etalon. This method is based on the analysis of multiple-beam transmission interference fringe pattern. Two-dimensional defect information is obtained by using small apertures placed over the entire area of the etalon. Experimental results for precise testing of an etalon with repeatability better than #x03BB;/2300 to 3#x03C3; are presented.

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Authors and Affiliations

  1. Faculty of Engineering, Tokyo Institute of Polytechnics, 1583, liyama, Atsugi, Kanagawa, 243-0297, Japan

    Shin-ichi Itoh, Yoshiki Yamazaki, Kentaro Katoh & Jun Chen

  2. CREST, Japan Science and Technology Corporation of Japan, 4-1-8, Honmachi, Kawaguchi, Saitama, 332-0012, Japan

    Jun Chen

Authors
  1. Shin-ichi Itoh
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  2. Yoshiki Yamazaki
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  3. Kentaro Katoh
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  4. Jun Chen
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Correspondence to Jun Chen.

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Itoh, Si., Yamazaki, Y., Katoh, K. et al. High Precision Testing Method for Fabry-Perot Etalon. OPT REV 8, 179–183 (2001). https://doi.org/10.1007/s10043-001-0179-1

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  • DOI: https://doi.org/10.1007/s10043-001-0179-1

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