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High-performance chemical mechanical polishing of GCr15 bearing steel enabled by the synergistic action of oxalic acid and H2O2

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Abstract

Excellent surface quality is strongly needed for improving the service performance of bearings under severe lubrication conditions. In this study, chemical mechanical polishing (CMP) was used to process GCr15 bearing steel. Oxalic acid and H2O2 were used as critical additives in the CMP slurries. In the presence of oxalic acid and with the increasing H2O2, the material removal rate (MRR) first increases sharply, then gradually decreases and reaches a plateau, and then decreases again. In particular, with the addition of 0.1 M oxalic acid and 1.5 wt% H2O2, a satisfactory CMP performance can be realized. The MRR is as high as 462 nm/min, and the surface roughness Ra is as low as 2.1 nm. During the CMP process, the surface film is composed of insoluble Fe3+ oxides and Fe-oxalic acid compounds. Insoluble Fe3+ oxides and FeC2O4 can effectively suppress the corrosion, leading to the low surface roughness. The formation of Fe-oxalic acid compounds, especially soluble ones, may weaken the surface film, resulting in the high MRR. A one-step CMP method was developed. Within 14 min, the Ra of GCr15 steel decreases from 249.3 nm to about 2.0 nm. This study provides a promising CMP method for bearing steel.

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Acknowledgements

The authors are grateful for the financial support by the National Key R&D Program of China (2020YFA0711001), National Natural Science Foundation of China (51975488 and 51991373), National Key R&D Program of China (2018YFB2000400), Fundamental Research Funds for the Central Universities (2682021CG011), and Beijing Key Laboratory of Long-life Technology of Precise Rotation and Transmission Mechanisms (BZ0388201902).

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  1. Tribology Research Institute, State Key Laboratory of Traction Power, Southwest Jiaotong University, Chengdu, 610031, China

    Jinwei Liu, Liang Jiang, Gangguo Xiao & Linmao Qian

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Liu, J., Jiang, L., Xiao, G. et al. High-performance chemical mechanical polishing of GCr15 bearing steel enabled by the synergistic action of oxalic acid and H2O2. J Solid State Electrochem 26, 809–820 (2022). https://doi.org/10.1007/s10008-022-05122-0

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