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Selective soluble polymer–assisted electrochemical delamination of chemical vapor deposition graphene

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Abstract

We have explored an optimized electrochemical delamination technique to transfer large area graphene grown by chemical vapor deposition (CVD) technique. A selective soluble polystyrene (PS) layer was added above the polymethyl-methacrylate (PMMA)/graphene/Cu stack. With the help of this PS film, the stack could provide enough strength to be picked up directly from electrolyte and rinsed in several deionized (DI) water baths to eliminate H2 bubbles and residual electrolysis ions. Besides, the PS layer was selective dissolved before the stack was transferred onto the target substrate leaving only the thin PMMA protective layer and graphene film scooped out onto the target substrate, which make sure that the thin and plastic film could fully stretch out on the substrate. As a result, the transferred graphene displayed high quality with less wrinkles, holes, and contaminants. This two-layer film–assisted electrochemical delamination technique is expected to play an important role in the application of two-dimensional materials in electrics, optoelectronics, and sensors.

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Acknowledgements

We thank Dayong Zhang for the help in the preparation and measurement of graphene back-gate field-effect transistor.

Funding

This work was supported by the National Science Foundation of China (Nos. 61604175, 61427901).

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Author notes

  1. Weier Lu and Song Cheng contributed equally to this work.

Authors and Affiliations

  1. Institute of Microelectronics, Chinese Academy of Sciences, No. 3, Beitucheng West Road, Beijing, 100029, China

    Weier Lu, Song Cheng, Meiju Yan, Yanwei Wang & Yang Xia

  2. University of Chinese Academy of Sciences, Beijing, 101407, China

    Song Cheng & Yang Xia

  3. College of Science, Beijing Jiaotong University, Beijing, 100044, China

    Meiju Yan & Yanwei Wang

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  1. Weier Lu
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  2. Song Cheng
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  3. Meiju Yan
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  4. Yanwei Wang
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  5. Yang Xia
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Correspondence to Weier Lu.

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Lu, W., Cheng, S., Yan, M. et al. Selective soluble polymer–assisted electrochemical delamination of chemical vapor deposition graphene. J Solid State Electrochem 23, 943–951 (2019). https://doi.org/10.1007/s10008-018-04172-7

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  • DOI: https://doi.org/10.1007/s10008-018-04172-7

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