Abstract.
Vibrational and optical properties of MoO3 thin films have been studied by Raman and infrared spectroscopy. The films were deposited onto Si substrates at a temperature of 150 °C by chemical vapor deposition of Mo(CO)6 at atmospheric pressure and different amounts of oxygen in the reactor. The Raman and IR spectral analyses show that the as-deposited films are in general amorphous. Post-deposition annealing at 300 and 400 °C leads to crystallization and the MoO3 film structure is a mixture of orthorhombic and monoclinic MoO3 modifications. Transformation of the monoclinic crystallographic modification to a thoroughly orthorhombic layered structure is observed for films heated at temperatures above 400 °C.
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Ivanova, .T., Gesheva, .K. & Szekeres, .A. Structure and optical properties of CVD molybdenum oxide films for electrochromic application. J Solid State Electrochem 7, 21–24 (2002). https://doi.org/10.1007/s10008-002-0274-7
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DOI: https://doi.org/10.1007/s10008-002-0274-7