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Capillary collapse of a micro-double cantilever beam: a rigorous study

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Abstract

High-aspect-ratio microstructures have been found, in the literature, to collapse due to capillary forces of liquids. In this paper, mathematical models are developed to study the collapse of a microstructure represented by a double cantilever beam (DCB) with a liquid droplet located at the free end. Formulations are presented using the classical Bernoulli–Euler beam theory as well as an analysis that accounts for geometrical nonlinearity. The models introduce rigorous coupling between the DCB deformation, the capillary forces, and the meniscus position, and have predicted interesting nonlinear behaviors that previous models could not. Parameters governing the capillary collapse of the DCB are identified, and their influence is discussed. A single dimensionless number that controls the condition for collapse is proposed and validated against numerical results. Comparison between the linear and nonlinear beam analyses shows that linear analysis generally suffices for the description of capillary collapse of microstructures.

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References

  1. Mastrangelo, C.: Suppression of stiction in MEMS. In: Proceedings of Materials Research Society Symposium, vol. 605, pp. 105–116 (2000)

  2. Mastrangelo C., Hsu C.: Mechanical stability and adhesion of microstructures under capillary forces—part I: basic theory. J. Microelectromech. Syst. 2, 33–43 (1993)

    Article  Google Scholar 

  3. Hui, Y., Yang, K., Jiao, B., Jing, Y., Chen, D.: Simple sticking models and adhesion criterion to predict sticking effects of fixed-fixed beams in RF MEMS switch design. In: Proceedings of 2010 5th IEEE-NEMS, vol. 5, pp. 997–1001 (2010)

  4. Tanaka T., Morigami M., Atoda N.: Mechanism of resist pattern collapse during development process. Jpn. J. Appl. Phys. 32, 6059–6064 (1993)

    Article  Google Scholar 

  5. Kotera, M., Ochiai, N.: Three-dimensional simulation of resist pattern deformation by surface tension at the drying process. Microelectron. Eng. 78–79, 515–520 (2005)

    Google Scholar 

  6. Yoshimoto K., Stoykovich M.P., Cao H.B., de Pablo J.J., Nealey P.F., Drugan W.J.: A two-dimensional model of the deformation of photoresist structures using elastoplastic polymer properties. J. Appl. Phys. 96, 1857–1865 (2004)

    Article  Google Scholar 

  7. Abe T., Reed M.: Control of liquid bridging induced stiction of micromechanical structures. J. Micromech. Microeng. 6, 213–217 (1996)

    Article  Google Scholar 

  8. Raccurt O., Tardif F., D’Avitaya F.A., Vareine T.: Influence of liquid surface tension on stiction of SOI MEMS. J. Micromech. Microeng. 14, 1083–1090 (2004)

    Article  Google Scholar 

  9. Lee H.J., Park J.T, Yoo J.Y, An I., Oh H.K.: Resist pattern collapse modeling for smaller features. J. Korean Phys. Soc. 42, S202–S206 (2003)

    Google Scholar 

  10. Yeh W.-M., Noga D., Lawson R., Tolbert L., Henderson C.: Comparison of positive tone versus negative tone resist pattern collapse behaviour. J. Vac. Sci. Technol. B. 28, C6S6–C6S11 (2010)

    Article  Google Scholar 

  11. Chini S.F., Amirfazli A.: Understanding pattern collapse in photolithography process due to capillary forces. Langmuir 26, 13707–13714 (2010)

    Article  Google Scholar 

  12. Peng, Y., Li, X., Kui, W.: Capillary adhesion between the micro-cantilever and the substrate. Key Eng. Mater. 353–358, 770–773 (2007)

    Google Scholar 

  13. Ouakad, H., Younis, M.: Modeling and simulations of collapse instabilities of microbeams due to capillary forces. Math. Probl. Eng. 2009, 16 pages (2009)

  14. Darvishianm A., Moeenfard H., Ahmadian M.T., Zohoor H.: A coupled two degree of freedom pull-in model for micromirrors under capillary force. Acta. Mech. 223, 387–394 (2012)

    Article  Google Scholar 

  15. Butt, H.J., Graf, K., Kappl, M.: Physics and Chemistry of Interfaces, pp. 8–12, 118–120. Wiley-VCH, Weinheim (2003)

  16. Cengel Y.A., Cimbala J.M.: Fluid Mechanics fundamentals and applications, pp. 287. McGraw-Hill, New York (2006)

    Google Scholar 

  17. de Boer M.P., Michalske T.A.: Accurate method for determining adhesion of cantilever beams. J. Appl. Phys. 86, 817–827 (1999)

    Article  Google Scholar 

  18. Hibbeler, R.C.: Mechanics of Materials, SI, 2nd edn, pp. 589, 607–614. Pearson Prentice Hall, Singapore (2005)

  19. Ugural, A.C., Fester, S.K.: Advanced Strength and Applied Elasticity, 4th edn, pp. 187, 198–199, 205. Prentice Hall, New Jersey (2003)

  20. Ding J., Wen S., Meng Y.: Theoretical study of the sticking of a membrane strip in MEMS under the Casimir effect. J. Micromech. Microeng. 11, 202–208 (2001)

    Article  Google Scholar 

  21. Glassmaker N., Hui C.: Elastica solution for a nanotube formed by self-adhesion of a folded thin film. J. Appl. Phys. 96, 3429–3434 (2004)

    Article  Google Scholar 

  22. Tang T., Glassmaker N.: On the inextensible elastica model for the collapse of nanotubes. Math. Mech. Solids 15, 591–606 (2010)

    Article  MATH  Google Scholar 

  23. Gilat, A., Subramaniam, V.: Numerical Methods for Engineers and Scientists: An Introduction with Applications using MATLAB, pp. 62–67, 127–130, 334, 353–354. Wiley, New Jersey (2008)

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Lavoie, S.R., Tang, T. Capillary collapse of a micro-double cantilever beam: a rigorous study. Acta Mech 224, 549–570 (2013). https://doi.org/10.1007/s00707-012-0775-0

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  • DOI: https://doi.org/10.1007/s00707-012-0775-0

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