Skip to main content
SpringerLink
Log in

Study of Thin Oxide Films by Electron, Ion and Synchrotron Radiation Beams

  • Published:
Microchimica Acta Aims and scope Submit manuscript

Abstract.

 Titanium oxide and zirconium oxide thin films deposited on silicon substrates were characterised using electron probe microanalysis (EPMA), Rutherford backscattering spectroscopy (RBS), time-of-flight elastic recoil detection analysis (TOF-ERDA) and scanning photoelectron microscopy (SPEM). The composition and mass thickness of the films were determined and the results of different methods compared. It was revealed that the synchrotron radiation used for SPEM studies caused considerable modification of zirconia films grown at low temperatures.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1.  Institute of Physics, University of Tartu, Riia 142, 51014 Tartu, Estonia, , , , , , EE

    Väino Sammelselg, Arvo Kikas, Juhan Karlis, Aivar Tarre & Jelena Asari

  2.  Accelerator Laboratory, University of Helsinki, P.O. Box 9, FIN-00014 Helsinki, Finland, , , , , , FI

    Eero Rauhala, Kai Arstila & Anni Seppälä

  3.  MAX-lab, National Laboratory for Nuclear Physics and Synchrotron Radiation Research, P.O. Box 118, SE-22100 Lund, Sweden, , , , , , SE

    Alex Zakharov

  4.  Institute of Materials Science, University of Tartu, Tähe 4, 51010 Tartu, Estonia, , , , , , EE

    Jaan Aarik

  5.  Department of Physics, Lund University, Sölvegatan 14, SE-22362, Sweden, , , , , , SE

    Indrek Martinson

Authors
  1. Väino Sammelselg
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Eero Rauhala
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kai Arstila
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Alex Zakharov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jaan Aarik
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Arvo Kikas
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Juhan Karlis
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Aivar Tarre
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Anni Seppälä
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. Jelena Asari
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. Indrek Martinson
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sammelselg, V., Rauhala, E., Arstila, K. et al. Study of Thin Oxide Films by Electron, Ion and Synchrotron Radiation Beams. Mikrochim Acta 139, 165–169 (2002). https://doi.org/10.1007/s006040200056

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s006040200056

Search

Navigation