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Fabrication of a 3D interdigitated double-coil microelectrode chip by MEMS technique

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Abstract

We have fabricated an interdigitated double-coil microelectrode chip for the determination of traces of phosphate by making use of a MEMS technique and enzyme immobilization technology. The chip is composed of two 3-dimensional strip microelectrodes which form a double coil microelectrode configuration with steep sidewalls and high aspect ratio. This novel configuration results in a high current response during amplification by redox cycling. The enzyme pyruvate oxidase was immobilized on the chip using gold nanoparticles as a support. Phosphate can be determined by using this chip with good sensitivity and linearity and in concentrations ranging from 0.5 μM to 7 μM.

A 3-dimensional interdigitated double coils microelectrode chip, which is with micron level strip width and high aspect ratio of height to interval, was fabricated by MEMS technique and enzyme immobilization technology. As an important index of environment monitoring, trace phosphate was determinate by this microelectrode chip with good sensitivity and linearity.

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Acknowledgements

This work is supported by the National Basic Research Program of China (973 Program) (Project Number 2009CB320300) and the Natural Science Foundation of China (60971070).

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Authors and Affiliations

  1. State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, 100190, People’s Republic of China

    Qiannan Xue, Chao Bian, Jianhua Tong, Jizhou Sun, Hong Zhang & Shanhong Xia

  2. Graduate University of Chinese Academic of Sciences, Beijing, 100049, People’s Republic of China

    Qiannan Xue

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  1. Qiannan Xue
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  2. Chao Bian
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  3. Jianhua Tong
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  4. Jizhou Sun
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  5. Hong Zhang
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  6. Shanhong Xia
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Correspondence to Shanhong Xia.

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Xue, Q., Bian, C., Tong, J. et al. Fabrication of a 3D interdigitated double-coil microelectrode chip by MEMS technique. Microchim Acta 177, 491–496 (2012). https://doi.org/10.1007/s00604-012-0770-0

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  • DOI: https://doi.org/10.1007/s00604-012-0770-0

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