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Microfabrication of a new sensor based on silver and silicon nanomaterials, and its application to the enrichment and detection of bovine serum albumin via surface-enhanced Raman scattering

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Abstract

A microchannel with a length of 40 mm, a width of 65 μm and a depth of 35 μm was fabricated on Si wafer via wet etching. This channel, composed of a silicon nanowire array and silver nanoparticles, served to enrich and detect bovine serum albumin as it yielded strong surface-enhanced Raman scattering at concentrations as low as 1 pM. The silver nanoparticles played two important roles: catalysts in the wet etching to produce the silicon nanowire array, and surface enhancers in Raman detection.

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Acknowledgement

Financial support from the National Natural Science Foundation of China (20571001, 20704001), the Education Department (no. 2006KJ006TD) of Anhui Province and Anhui Provincial Natural Science Foundation (070414185) are appreciated.

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Correspondence to Mingwang Shao.

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Shao, M., Lu, L., Wang, H. et al. Microfabrication of a new sensor based on silver and silicon nanomaterials, and its application to the enrichment and detection of bovine serum albumin via surface-enhanced Raman scattering. Microchim Acta 164, 157–160 (2009). https://doi.org/10.1007/s00604-008-0051-0

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  • DOI: https://doi.org/10.1007/s00604-008-0051-0

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