Abstract
An innovative method for fabrication and rapid prototyping of high-aspect ratio micromechanical components in photoresist is discussed. The photoresist is an epoxy-negative-tone resist, called SU-8, which can be structured to more than 2 mm in thickness by UV exposure. Small gears of 530 μm in diameter and 200 μm in thickness have been realized in this photoplastic and their functionality has been demonstrated. In addition a process called MIMOTECTM (MIcroMOlds TEChnology) has been established for the fabrication of metallic micromolds. MIMOTECTM is based on the use of the SU-8 spun on high thicknesses and electrodeposition of nickel. Thermoplastic microcomponents have been injected and mounted in watches.
Similar content being viewed by others
Author information
Authors and Affiliations
Additional information
Received: 25 August 1997/Accepted: 23 October 1997
Rights and permissions
About this article
Cite this article
Lorenz, H., Despont, M., Vettiger, P. et al. Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist. Microsystem Technologies 4, 143–146 (1998). https://doi.org/10.1007/s005420050118
Issue Date:
DOI: https://doi.org/10.1007/s005420050118