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Angular rate sensor and accelerometer combined on the same micromachined CMOS chip

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Abstract

 This paper describes an electroformed micromachining technology capable of producing both angular rate sensors and accelerometers. The sensors fabricated are CMOS integrated for improved signal output. Automotive applications for these devices will also be discussed.

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Authors and Affiliations

  1. Delphi-Delco Electronics Systems, Kokomo, IN 46904 USA, , , , , , US

    D. R. Sparks, X. Huang, W. Higdon & J. D. Johnson

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  1. D. R. Sparks
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  2. X. Huang
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  3. W. Higdon
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  4. J. D. Johnson
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Received: 25 August 1997/Accepted: 23 October 1997

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Sparks, D., Huang, X., Higdon, W. et al. Angular rate sensor and accelerometer combined on the same micromachined CMOS chip. Microsystem Technologies 4, 139–142 (1998). https://doi.org/10.1007/s005420050117

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  • DOI: https://doi.org/10.1007/s005420050117

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