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Received: 25 August 1997/Accepted: 22 September 1997
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Roetting, O., Heckele, M. & Bacher, W. Technology for movable microstructures - Transfer of laboratory processes to industrial production. Microsystem Technologies 4, 120–121 (1998). https://doi.org/10.1007/s005420050111
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DOI: https://doi.org/10.1007/s005420050111