Author information
Authors and Affiliations
Additional information
Received: 25 August 1997/Accepted: 22 September 1997
Rights and permissions
About this article
Cite this article
Griffiths, S., Nilson, R., Ting, A. et al. Modeling electrodeposition for LIGA microdevice fabrication. Microsystem Technologies 4, 98–101 (1998). https://doi.org/10.1007/s005420050105
Issue Date:
DOI: https://doi.org/10.1007/s005420050105