Abstract
In this paper, a novel microelectromechanical system (MEMS) inertial switch with self-latching mechanism and adjustable acceleration threshold is proposed. The switch consisted of a proof mass suspended by flexible springs. Permanent magnets, ferromagnets and planer coils were integrated in the device to realize the latching and threshold tuning mechanism. The centrifugal experiment and laser based position measurement have been conducted to measure the acceleration threshold and the stiffness of the spring respectively. The inertial threshold value and the spring stiffness were measured as 5.27 g and 163.12 N/m. The discrepancy between measured acceleration threshold results (5.27 g) and the analytical acceleration threshold results (5 g) is mainly due to the dimension errors during device fabrication. By applying a reverse current of 0.1 A, the switch can be unlatched from its ‘on-state’. Experiment also demonstrates that by applying a current varying from − 0.5 A to 0.5 A, the threshold value can be adjusted from 6 g to 3.75 g.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Baker MS, Howell LL (2002) On-chip actuation of an in-plane compliant bistable micromechanism. J Microelectromech Syst 11(5):566–573. https://doi.org/10.1109/JMEMS.2002.803284
Gao R, Li M, Wang Q, Zhao J, Liu S (2018) A novel design method of bistable structures with required snap-through properties. Sens Actuators A Phys 272:295–300. https://doi.org/10.1016/j.sna.2017.12.019
Hansen BJ, Carron CJ, Jensen BD, Hawkins AR, Schultz SM (2007) Plastic latching accelerometer based on bistable compliant mechanisms. Smart Mater Struct 16(5):1967–1972. https://doi.org/10.1088/0964-1726/16/5/055
Hoffmann M, Kopka P, Voges E (1999) All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining. IEEE J Sel Top Quantum Electron 5(1):46–51. https://doi.org/10.1109/2944.748104
Howell LL, Midha A (1994) A method for the design of compliant mechanisms with small-length flexural pivots. J Mech Des 116(1):280–290. https://doi.org/10.1115/1.2919359
Jensen BD (2003) Identification of macro- and micro-compliant mechanism configurations resulting in bistable behavior. Brigham Young University, p 185
Jia M, Li X, Song Z, Bao M, Wang Y, Yang H (2007) Micro-cantilever shocking-acceleration switches with threshold adjusting and ‘on’-state latching functions. J Micromech Microeng 17(3):567–575. https://doi.org/10.1088/0960-1317/17/3/020
Kim J-M, Kim Y-K, Kim H-S, Jang Y-H (2012) MEMS acceleration switch capable of increasing threshold acceleration. Electron Lett 48(25):1614–1616. https://doi.org/10.1049/el.2012.3794
Kim H, Jang YH, Kim YK, Kim JM (2014) MEMS acceleration switch with bi-directionally tunable threshold. Sens Actuators A Phys 208:120–129. https://doi.org/10.1016/j.sna.2014.01.003
Masters ND, Howell LL (2003) A self-retracting fully compliant bistable micromechanism. J Microelectromech Syst 12(3):273–280. https://doi.org/10.1109/JMEMS.2003.811751
Ramini A, Younis MI, Su QT (2013) A low-g electrostatically actuated resonant switch. Smart Mater Struct 22(2):025006. https://doi.org/10.1088/0964-1726/22/2/025006
Saif MTA (2000) On a tunable bistable MEMS-theory and experiment. J Microelectromech Syst 9(2):157–170. https://doi.org/10.1109/84.846696
Wang Y, Xie J, Zhang F, Tao F, Xiong Z, Zhi C (2022) A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil. J Micromech Microeng 32(3):035005. https://doi.org/10.1088/1361-6439/ac5170
Wang H, Zhao J, Jia J, Zhang D (2008) Design and experiments of a permanent magnetic inertial miniature switch. In: 2008 3rd IEEE international conference on nano/micro engineered and molecular systems. IEEE, Sanya, pp 319–322. https://doi.org/10.1109/NEMS.2008.4484343.
Zhang F, Yuan M, Jin W, Xiong Z (2017) Fabrication of a silicon based vertical sensitive low-g inertial micro-switch for linear acceleration sensing. Microsyst Technol 23(7):2467–2473. https://doi.org/10.1007/s00542-016-3008-y
Zhang X, Xiang X, Wang Y, Ding G, Xu X, Yang Z (2019) A heterogeneous integrated MEMS inertial switch with compliant cantilevers fixed electrode and electrostatic locking to realize stable on-state. J Microelectromech Syst 28(6):977–986. https://doi.org/10.1109/JMEMS.2019.2938055
Zhao J, Yang Y, Wang H, Jia J (2010a) A novel magnetic actuated bistable acceleration switch with low contact resistance. IEEE Sens J 10(4):869–876. https://doi.org/10.1109/JSEN.2009.2036442
Zhao J, Yang Y, Fan K, Hu P, Wang H (2010b) A bistable threshold accelerometer with fully compliant clamped-clamped mechanism. IEEE Sens J 10(5):1019–1024. https://doi.org/10.1109/JSEN.2010.2042712
Zhao J, Huang Y, Gao RJ, Wang HX (2011) Dynamics of a bistable mechanism with parallel beams and permanent magnets. Adv Mater Res 308–310:508–512. https://doi.org/10.4028/www.scientific.net/AMR.308-310.508
Zhao J, Gao R, Yang Y, Huang Y, Hu P (2013) A bidirectional acceleration switch incorporating magnetic-fields-based tristable mechanism. IEEE/ASME Trans Mechatron 18(1):113–120. https://doi.org/10.1109/TMECH.2011.2163725
Zhao J, Gao R, Chen G, Liu S, Cao Q, Qiu T (2015) Nonlinear coupling mechanical model for large stroke magnetic-based multistable mechanisms. Mech Mach Theory 83:56–68. https://doi.org/10.1016/j.mechmachtheory.2014.09.004
Acknowledgements
This work was supported by Supported by NSAF (Grant No. U1930206). The authors would also like to thank all the clean room and characterization center staff from Institute of Electronic Engineering, China Academy of Engineering Physics, for their constant technical support.
Author information
Authors and Affiliations
Corresponding authors
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Wang, X., Zhi, C., Li, Y. et al. Design and analysis of micro inertial switch with magnetic latch and adjustable threshold. Microsyst Technol (2024). https://doi.org/10.1007/s00542-024-05652-9
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00542-024-05652-9