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Performance analysis of cascade type three-chamber piezoelectric pump

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Abstract

In order to improve the utilization rate of the pump chamber of the multi-chamber piezoelectric pump, a cascade type series-parallel hybrid three-chamber piezoelectric pump is proposed in this paper. The first stage and the second stage use the cascade type to achieve the purpose of reducing the area compared with the traditional three-chamber piezoelectric pump. First, the theoretical modeling analysis of its structure is carried out to reveal the influencing factors of flow rate and pressure. A test prototype is designed and built. The output performance of this piezoelectric pump is better with asynchronous driving mode. The best flow rate in asynchronous driving mode exceeds in synchronous driving mode by 356.54%. The optimal pressure in asynchronous driving mode exceeds the optimal pressure in synchronous driving mode by a percentage of 123.53%. This study provides some references for improving the utilization rate of the pump chamber.

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Acknowledgements

This work was supported by The Education Department of Jilin Province(JJKH20220678KJ); Research on the key technology of a novel piezoelectric fluid-driven pump based on solid-liquid coupling analysis(JJKH20221300KJ).

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Authors and Affiliations

  1. College of Mechanical and Electrical Engineering, Changchun University of Technology, Changchun, 130012, China

    Renhui Hu, Lipeng He, Dianbin Hu & Yi Hou

  2. Institute of Precision Machinery and Smart Structure, Zhejiang Normal University, Jinhua, 321004, China

    Guangming Cheng

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  1. Renhui Hu
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  2. Lipeng He
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  3. Dianbin Hu
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  4. Yi Hou
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  5. Guangming Cheng
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Correspondence to Lipeng He.

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Hu, R., He, L., Hu, D. et al. Performance analysis of cascade type three-chamber piezoelectric pump. Microsyst Technol 30, 83–92 (2024). https://doi.org/10.1007/s00542-023-05574-y

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