Abstract
We developed a flexible micro-positioning platform for ceramic material testing to maximize the use of the high amplification ratio of the bridge-type mechanism. This platform uses the bridge-type amplifier mechanism and the laminated piezoelectric ceramic driver as the driving device. It has the capability for three-degree-of-freedom fretting, featuring robust bearing capacity, minimal motion loss during operation, and high transmission efficiency. The magnification and natural frequency expressions of the positioning platform were derived by applying the principles of material mechanics, elastic beam theory, and the Lagrange equation. The magnification and natural frequency of the micro-positioning platform were simulated using finite element software, and the results were analyzed and compared with the theoretical results. The simulation results show the feasibility and high positioning accuracy of the micro-positioning platform. The proposed platform shows application potential in ceramic material testing.
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The data are available from the corresponding author on reasonable request.
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Acknowledgements
This research was supported by the National Key R&D Program of China, Project No. 2021YFB4001500, and the PhD Research Start-up Fund of Jingdezhen Ceramic University, Project No. 20298002, and the Youth Fund of Jiangxi Provincial Department of Education, Project No. 72005256, and the Fund of Jiangxi Provincial Department of Education, Project No. GJJ2201020, and the Fund of Science and Technology Program of Jingdezhen City, Project No. 20212GYZD009-19.
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Dong, G., Sun, S., Kong, X. et al. Design and analysis of a new micro-positioning platform for ceramic material testing. Microsyst Technol 30, 55–64 (2024). https://doi.org/10.1007/s00542-023-05563-1
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DOI: https://doi.org/10.1007/s00542-023-05563-1