Skip to main content
SpringerLink
Log in

A novel non-vacuum packaged triaxial accelerometer with differential dual-axis resonantors and torsional elements

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

A Correction to this article was published on 27 December 2023

This article has been updated

Abstract

Tri-axis MEMS accelerometers are used in a wide range of applications such as health monitoring, industrial electronics and navigation guidance due to their low cost, high performance and integration. At this stage, the main structure of commercial products of triaxial accelerometers is the integration of three single-axis capacitive accelerometers. However, many reports have shown that resonant accelerometers can achieve better performance than capacitive accelerometers. In this paper, a novel triaxial accelerometer include a dual-axis resonantors and two torsional elements is proposed. The prototype was fabricated using MEMS processing technology and had a footprint of 10.8 mm × 10.8 mm. A non-vacuum package is adopted to guarantee the stability of the torsional accelerometers included. As a result, a low Q value is obtained for each part included. The effect of low Q is analyzed and its control circuit is optimized to obtain excellent stability. Finally, the triaxial accelerometer prototype was tested to evalute its performance, the Q value of each resonantors is lower than 100, the cross-axis coupling coefficient is below than 0.5%, the nonlinearity is belower than 0.053% at a range of ± 10 g and the bias instability at each axis is 5.7 μg, 4.8 μg and 73 μg respectively (X, Y and Z aixs).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17

Similar content being viewed by others

Change history

References

  • Aydemir A, Terzioglu Y, Akin T (2016) A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer. Sens Actuators, A Phys 244:324–333

    Article  Google Scholar 

  • Cai SR, Li W, Zou HS, Bao HF, Zhang K, Wang JC et al (2019) Design, fabrication, and testing of a monolithically integrated tri-axis high-shock accelerometer in single (111)-silicon wafer. Micromachines 10:227

    Article  Google Scholar 

  • Caspani A, Comi C, Corigliano A, Langfelder G, Zega V, Zerbini S (2014) A differential resonant micro accelerometer for out-of-plane measurements, 28th European conference on solid-state transducers (EUROSENSORS 2014), pp. 640–3

  • Chau KHL, Lewis SR, Zhao Y, Howe RT, Bart SF, Marcheselli RG (1996) An integrated force-balanced capacitive accelerometer for low-g applications. Sens Actuators, A Phys 54:472–476

    Article  Google Scholar 

  • Comi C, Corigliano A, Zega V, Zerbini S (2016) Non linear response and optimization of a new z-axis resonant micro-accelerometer. Mechatronics 40:235–243

    Article  Google Scholar 

  • Dong P, Li X, Yang H, Bao H, Zhou W, Li S et al (2008) High-performance monolithic triaxial piezoresistive shock accelerometers. Sens Actuators, A Phys 141:339–346

    Article  Google Scholar 

  • Fang ZX, Yin YG, Chen C, Zhang SJ, Liu YF, Han FT (2021) A sensitive micromachined resonant accelerometer for moving-base gravimetry. Sens Actuators A-Phys 325:112694

    Article  Google Scholar 

  • Jeong Y, Serrano DE, Keesara V, Sung WK, Ayazi F (2013) Wafer-level vacuum-packaged triaxial accelerometer with nano airgaps, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 33–6

  • Jono K, Hashimoto M, Esashi M (1994) Electrostatic servo system for multi-axis accelerometers, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems, pp. 251–6

  • Kraft M, Lewis C, Hesketh T, Szymkowiak S (1998) A novel micromachined accelerometer capacitive interface. Sens Actuators, A Phys 68:466–473

    Article  Google Scholar 

  • Lemkin M, Boser BE (1996) A micromachined fully differential lateral accelerometer, Proceedings of Custom Integrated Circuits Conference pp. 315–8

  • Lötters JC, Bomer JG, Verloop AJ, Droog EA, Olthuis W, Veltink PH et al (1998) Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer. Sens Actuators, A 66:205–212

    Article  Google Scholar 

  • Lyons GM, Culhane KM, Hilton D, Grace PA, Lyons D (2005) A description of an accelerometer-based mobility monitoring technique. Med Eng Phys 27:497–504

    Article  Google Scholar 

  • Puers R, Reyntjens S (1998) Design and processing experiments of a new miniaturized capacitive triaxial accelerometer. Sens Actuators, A Phys 68:324–328

    Article  Google Scholar 

  • Seok S, Chun K (2006) Inertial-grade in-plane resonant silicon accelerometer. Electron Lett 42:1092–1094

    Article  Google Scholar 

  • Seshia AA, Palaniapan M, Roessig TA, Howe RT, Gooch RW, Schimert TR et al (2002) A vacuum packaged surface micromachined resonant accelerometer. J Microelectromech Syst 11:784–793

    Article  Google Scholar 

  • Shaeffer DK (2013) MEMS inertial sensors: a tutorial overview. IEEE Commun Mag 51:100–109

    Article  Google Scholar 

  • Takao H, Matsumoto Y, Ishida M (1997) A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), vol.2 pp. 1173–6

  • Yang B, Dai B, Zhao H, Liu XJ (2014) IEEE, A New Silicon Triaxial Resonant Micro-accelerometer, International conference on information science, electronics and electrical engineering (ISEEE) 1–3, pp. 1282

  • Yin YG, Fang ZX, Han FT, Yan B, Dong JX, Wu QP (2017) Design and test of a micromachined resonant accelerometer with high scale factor and low noise. Sens Actuators A-Phys 268:52–60

    Article  Google Scholar 

  • Zhao C, Pandit M, Sobreviela G, Steinmann P, Mustafazade A, Zou XD et al (2019) A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz(1/2) noise floor. J Microelectromech Syst 28:324–326

    Article  Google Scholar 

  • Zou XD, Seshia AA (2015) IEEE, A high-resolution resonant mems accelerometer, 2015 transducers—2015 18th international conference on solid-state sensors, actuators and microsystems (transducers) 2015, pp. 1247–50

  • Zou HS, Wang JC, Chen F, Bao HF, Jiao D, Zhang K et al (2017) Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency. J Micromech Microeng 27:075009

    Article  Google Scholar 

Download references

Acknowledgements

This work was funded Aeronautical Science Foundation of China (No.20160869004).

Author information

Authors and Affiliations

  1. Key Laboratory of Micro-lnertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing, 210096, China

    Jinhui Li, Dunzhu Xia, Xiuhua Yang & Bing Zhang

  2. School of Instrument Science and Engineering, Southeast University, Nanjing, 210096, China

    Jinhui Li, Dunzhu Xia, Xiuhua Yang & Bing Zhang

  3. Aviation Key Laboratory of Science and Technology on Inertial Technology, FACRI, Xi’an, 710065, China

    Songli Wang

Authors
  1. Jinhui Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dunzhu Xia
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Songli Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Xiuhua Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Bing Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dunzhu Xia.

Ethics declarations

Conflict of interest

The authors declare no conflict of interest.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

The original online version of this article was revised: to update all the affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Li, J., Xia, D., Wang, S. et al. A novel non-vacuum packaged triaxial accelerometer with differential dual-axis resonantors and torsional elements. Microsyst Technol 30, 33–43 (2024). https://doi.org/10.1007/s00542-023-05538-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-023-05538-2

Search

Navigation