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Design and performance analysis of ohmic contact based SPMT RF MEMS switch

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Abstract

RF signal routers are become prominent in the modern wireless communication transceivers. SPMT RF MEMS switches predominantly plays significant role in RF signal routing. The recent advances in RF signal routing demands high efficiency offering SPMT RF switches. This communication discusses the design of SPMT switches using ohmic contact RF MEMS technology for RF signal routing applications. The ohmic contact switches are designed using multi-contact cantilever structures. The cantilever structure is incorporated in the CPW line without disturbing the RF properties. The multi-contact cantilever structures helps to improve the reliability of microstructures. The presented SPMT switch was enabled with reconfigurability feature in terms of frequency. Three identical ohmic contact switches are used for the design of SPMT switch. The switch requires a low Actuation voltage of 3.5 V. The presented SPMT RF switch offering low insertion of − 0.45 dB and high isolation of − 65 dB.

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References

  • Afshin K et al (2016) A novel SPDT rotary RF MEMS switch for low loss and power efficient signal routing. IETE J Res 62(1):68–80

    Article  Google Scholar 

  • Ashok Kumar P, Srinivasa Rao K, GirijaSravani K (2021) An intensive approach to optimize capacitive type RF MEMS shunt switch. Microelectron J 112:105050

    Article  Google Scholar 

  • Ashraf S, Omar A, Arshad A, Asad MK, Bashir H, Kyong Hoon K, Ayaz U (2020) Bodacious-instance coverage mechanism for wireless sensor network. Wirel Commun Mobile Comput 2:1–11

    Google Scholar 

  • Ashraf S, Tauqeer A, Sehrish S (2021) NRSM: Node redeployment shrewd mechanism for wireless sensor network. Iran J Comput Sci 4(3):171–183

    Article  Google Scholar 

  • Bansal D et al (2019) Improved design of ohmic RF MEMS switch for reduced fabrication steps. IEEE Trans Electron Dev 66(10):4361–4366

    Article  Google Scholar 

  • Carty E et al. (2016) Development of a DC to K-band ultra-long on-life RF MEMS switch with integrated driver circuitry. 46th European microwave conference (EuMC). IEEE

  • Chokkara SP, Gaur A, Sravani KG, Balaji B, Rao KS (2022) Design, simulation and analysis of a slotted RF MEMS switch. Trans Electr Electron Mater 23(4):419–429

    Article  Google Scholar 

  • Chris K, Moran T, Todd M (2016) Advances in MEMS switches for RF test applications. 11th European Microwave Integrated Circuits Conference (EuMIC) IEEE

  • Dey S, Koul SK, Reliability analysis of Ku-band 5-bit phase shifters using MEMS SP4T and SPDT switches. IEEE Trans Microw Theory Tech 63(12):3997–4012

  • Gaikwad MS et al (2019) Evaluating thermal contact resistance for ohmic type RF MEMS switch. International Conference on Nascent Technologies in Engineering (ICNTE). IEEE

  • Ghosekar IC et al (2015) SPMT, MPST RF MEMS switch using multiplexer approach. International Conference on Communications and Signal Processing (ICCSP). IEEE

  • Gopichand C, Reshmi M, Maity NP (2021) Electromagnetic modelling and analysis of RF MEMS capacitive shunt switch for 5G applications. Microelectron J 117:25

    Google Scholar 

  • Gopichand C, Reshmi M, Rao KS, Maity NP, Sravani KG (2022a) Design and analysis RF-MEMS capacitive SPDT switch for wireless applications. Micro and nanoelectronics devices circuits and systems. Springer, Berlin, pp 363–370

    Google Scholar 

  • Gopichand C, Reshmi M, Rao KS, Maity NP, Sravani KG (2022b) Design and analysis RF-MEMS capacitive SPDT switch for wireless applications. Micro Nanoelectron Dev Circ Syst pp 363–370

  • Hyeon Cheol K, Kukjin C (2007) RF MEMS technology. Trans Electr Electron Eng 2(3):249–261

    Article  Google Scholar 

  • Iannacci J (2017) RF-MEMS technology for high-performance passives. IOP Publishing

  • Jason Yao J (2010) RF MEMS from a device perspective. J Micromech Microeng 10:R9–R38

    Google Scholar 

  • Jitendra PZ, Yong (2021) Low-voltage and high-reliability RF MEMS switch with combined electro thermal and electrostatic actuation. Micromachines 12(10):5

    Google Scholar 

  • Liu AQ (2010) RF MEMS switches and integrated switching circuits. Springer Science & Business Media, Berlin

    Book  Google Scholar 

  • Ma Q et al (2007) Metal contact reliability of RF MEMS switches. Reliability, packaging, testing, and characterization of MEMS/MOEMS 6463

  • Narayana TL, Sravani KG, Rao KS (2017) A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications. Cogent Eng 4(1):2

    Google Scholar 

  • Qiu H, Hong W, Feixiang K (2013) Instability of contact resistance in MEMS and NEMS DC switches under low force: the role of alien films on the contact surface. Sensors 13(12):202

    Article  Google Scholar 

  • Rao KS, Naveena P, Sravani KG (2019) Materials impact on the performance analysis and optimization of RF MEMS switch for 5G reconfigurable antenna. Trans Elect Electron Mater 20(4):315–327

    Article  Google Scholar 

  • Rao KS, Kumar PA, Guha K, Sailaja BVS, Vineetha KV, Baishnab KL, Sravani KG (2021) Design and simulation of fixed–fixed flexure type RF MEMS switch for reconfigurable antenna. Microsyst Technol 27(2):455–462

    Article  Google Scholar 

  • Sravani KG (2021) Optimization and analysis of bridge type RF MEMS switch for X-band. Microsyst Technol 27(10):3735–3741

    Article  Google Scholar 

  • Sravani KG (2021) Design and simulation of RF-MEMS shunt switch for K-band applications. Microsyst Technol 27(8):3105–3109

    Article  Google Scholar 

  • Sravani KG, Guha K, Rao KS (2018) Analysis on selection of beam material for novel step structured RF-MEMS switch used for satellite communication applications. Trans Elect Electron Mater 19(6):467–474

    Article  Google Scholar 

  • Sravani KG, Guha K, Rao KS, Elsinawi A (2019) Design of a novel structure capacitive RF MEMS switch to improve performance parameters. IET Circ Dev Syst 13(7):1093–1101

    Article  Google Scholar 

  • Sravani KG, Guha K, Rao KS (2020) A modified proposed capacitance model for step structure capacitive RF MEMS switch by incorporating fringing field effects. Int J Electron 107:1822–1843

    Article  Google Scholar 

  • Sravani KG, Gopichand C, Rao KS (2022c) Design and analysis of a serpentine type RF MEMS shunt switch with low pull-in-voltage. Trans Electr Electron Mater 23:4

    Article  Google Scholar 

  • Sravani KG, Guha K, Aditya B, Rao KS (2022a) Design, simulation and analysis of uniform and non-uniform serpentine step structure RF MEMS switch. 28(3):855–865

  • Sravani KG, Sai NY, Billscott M, Reddy PG, Vallem S, Amarnath G, Rao KS (2022b) Designing of RF-MEMS capacitive contact shunt switch and its simulation for S-band application. Lect Notes Electr Eng

  • Srinivasa Rao K, Sailaja BVS, Vineetha KV, Ashok Kumar P, Koushik G, GirijaSravani K (2021a) Design and analysis of asymmetric structure capacitive RF MEMS shunt switch. Microsyst Technol 27(2):503–513

    Article  Google Scholar 

  • Srinivasa Rao K, Shoukath Vali S, GirijaSravani K, Ashok Kumar P, Guha K (2021b) Design and simulation of Bi-metallic RF MEMS switch for fast switching time. Lect Notes Electr Eng 755:213–223

    Article  Google Scholar 

  • Srinivasa Rao K, GirijaSravani K, Akhil Chowdary Y, Naveena P, Vedha Vyasa K, Raina H, Deepa Sunanda B (2022) Design, analysis and simulation of RF MEMS capacitive shunt switch with perforations for Ka-band applications. Trans Electr Electron Mater 23(4):382–387

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to Be University) Greenfields, Guntur, A.P&Department of ECE, NS Raju Institute of Technology, Visakhapatnam, India

    K. Rajasekhar

  2. Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to Be University) Greenfields, Guntur, A.P, India

    K. GirijaSravani & K. Srinivasa Rao

Authors
  1. K. Rajasekhar
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  2. K. GirijaSravani
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  3. K. Srinivasa Rao
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Correspondence to K. Srinivasa Rao.

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Rajasekhar, K., GirijaSravani, K. & Srinivasa Rao, K. Design and performance analysis of ohmic contact based SPMT RF MEMS switch. Microsyst Technol 29, 1307–1318 (2023). https://doi.org/10.1007/s00542-023-05503-z

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  • DOI: https://doi.org/10.1007/s00542-023-05503-z

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