Abstract
In this paper, a system of magnetically coupled oscillators consisting of a Π-shaped horizontal cantilever and a rectangular vertical cantilever with a frequency ratio of 1:2, is proposed for high-sensitivity mass detection. Through driving the horizontal cantilever directly by a periodic excitation force, two symmetric peaks in its amplitude-frequency curve can be observed due to the energy transfer from it to the vertical beam. The two peaks remain symmetrical with the fluctuation of excitation force but change antisymmetrically after applying mass perturbation on the tip of horizontal beam. Hence, both amplitude difference and frequency sum of those two peaks exhibit differential-like characteristics, and both their differential amplification performance for mass perturbation and their suppression performance for the fluctuation of the excitation force are further compared. The frequency sum-based sensing scheme not only shows better suppression performance, but also can further amplify mass sensitivity through combining frequency multiplication. In addition, effect of modal damping on driving threshold and sensing range is further researched for optimization. Compared to conventional resonant frequency shift-based sensing scheme, the proposed one not only differentially amplifies the mass sensitivity, but also greatly suppresses the effect of driving amplitude fluctuation, indicating great potential for high sensitivity mass detection.
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Acknowledgements
This work is partially supported by the National Natural Science Foundation of China (Grant No. 51975250, Grant No. 51675229). Part of this work is also financially supported by Free Exploration Key Project of Jilin Natural Science Foundation (Grant No. 2020122366JC), Scientific Research Foundation for Leading Professor Program of Jilin University (Grant No. 419080500171 and No. 419080500264) and Graduate Innovation Fund of Jilin University (Grant No. 101832020CX101).
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Xia, C., Wang, D.F., Ono, T. et al. Magnetically coupled oscillators applicable to high-sensitivity mass detection. Microsyst Technol 28, 2443–2453 (2022). https://doi.org/10.1007/s00542-022-05375-9
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DOI: https://doi.org/10.1007/s00542-022-05375-9