Abstract
Macro to nanoscale energy scavengers is emerging as a promising solution to tackle the problems of energy shortage caused due to increasing world population and limited availability of energy resources. The capability of the miniaturized scavengers to harvest ambient energy like vibrations, mechanical motions, and body motions makes them an efficient alternative to clean energy solutions. This paper reviews the works done in the field of piezoelectric and triboelectric energy scavengers, the authors briefly described different types of scavengers, recent state-of-the-art designs, operating modes, performance comparisons, and future scope considering critical evaluation which can help the researchers to decide their work approach in the field of energy scavenging. The authors also speculate on how future advances in 3D printing technology and textile base energy scavenging could aid in the creation of wearable electronics. Energy scavengers will surely replace many energy sources in the coming future and will be proven to be a trailblazing method in the field of environment-friendly energy generation.
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References
Ahmed A, Hassan I, Helal AS, Sencadas V, Radhi A, Jeong CK, ElKady MF (2020) Triboelectric nanogenerator versus piezoelectric generator at low frequency (<4 Hz): a quantitative comparison. iScience 23(7):101286. https://doi.org/10.1016/j.isci.2020.101286
Alameh AH, Gratuze M, Elsayed MY, Nabki F (2018) Effects of proof mass geometry on piezoelectric vibration energy harvesters. Sensors (switzerland). https://doi.org/10.3390/s18051584
Ali A, Pasha RA, Elahi H, Sheeraz MA, Bibi S, Hassan ZU, Eugeni M, Gaudenzi P (2019) Investigation of deformation in bimorph piezoelectric actuator: analytical, numerical and experimental approach. Integr Ferroelectr 201(1):94–109. https://doi.org/10.1080/10584587.2019.1668694
Apodaca MM, Wesson PJ, Bishop KJM, Ratner MA, Grzybowski BA (2010) Contact electrification between identical materials. Angew Chemie - Int Ed 49(5):946–949. https://doi.org/10.1002/anie.200905281
Babak Ziaie MZA, Baldi A (2007) Introduction to micro- and nanofabrication. In: Bhushan B (ed) Handbook of nanotechnology. Springer, pp 231–269
Balpande S, Pande RS (2016) Design and simulation of MEMS cantilever based energy harvester-power source for piping health monitoring system. In: RAECE 2015 - Conf. Proceedings, Natl. Conf. Recent Adv. Electron. Comput. Eng, pp 183–188. https://doi.org/10.1109/RAECE.2015.7509886
Balpande SS, Bhaiyya ML, Pande RS (2017) Low-cost fabrication of polymer substratebased piezoelectric microgenerator with PPE, IDE and ME. Electron Lett 53(5):341–343. https://doi.org/10.1049/el.2016.4099
Balpande SS, Kalambe J, Pande RS (2018) Vibration energy harvester driven wearable biomedical diagnostic system. In: NEMS 2018 - 13th Annu. IEEE Int. Conf. Nano/Micro Eng Mol Syst, pp 448–451. https://doi.org/10.1109/NEMS.2018.8556864
Balpande SS, Kalambe JP, Pande RS (2019) Development of strain energy harvester as an alternative power source for the wearable biomedical diagnostic system. Micro Nano Lett 14(7):777–781. https://doi.org/10.1049/mnl.2018.5250
Balpande SS, Pande RS, Patrikar RM (2016) Design and low cost fabrication of green vibration energy harvester. Sensors Actuators, A Phys 251:134–141. https://doi.org/10.1016/j.sna.2016.10.012
Balpande SS, Pande RS, Patrikar RM (2021) Grains level evaluation and performance enhancement for piezoelectric energy harvester. Ferroelectrics 572(1):71–93. https://doi.org/10.1080/00150193.2020.1868874
Bayramol DV, Soin N, Shah T, Siores E, Matsouka D, Vassiliadis S (2017) Energy harvesting smart textiles. Springer International Publishing
Bedeloglu A, Demir A, Bozkurt Y, Sariciftci NS (2010) A photovoltaic fiber design for smart textiles. Text Res J 80(11):1065–1074. https://doi.org/10.1177/0040517509352520
Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Meas Sci Technol. https://doi.org/10.1088/0957-0233/17/12/R01
Betancourt T, Brannon-peppas L (2006) “Micro- and nanofabrication methods in nanotechnological medical and pharmaceutical devices. Int J Nanomed 1(4):483–495
Bourisli RI, Al-Ajmi MA (2010) Optimization of smart beams for maximum modal electromechanical coupling using genetic algorithms. J Intell Mater Syst Struct 21(9):907–914. https://doi.org/10.1177/1045389X10370544
Bryzek J (2014) Trillion sensors movement in support of abundance and internet of everything. Vice President, MEMS and Sensing Solutions, Fairchild Semiconductor, Santa Clara, CA
Cao W, Zhu S, Jiang B (1998) Analysis of shear modes in a piezoelectric vibrator. J Appl Phys 83(8):4415–4420. https://doi.org/10.1063/1.367233
Chakole P, Rathee V, Kalambe J, Kulkarni P, Balpande SS (2019) Design and development of triboelectric blue energy harvester. Int J Eng Adv Technol 8(5):1278–1283
Chen B (2019) Introduction to energy harvesting transducers and their power conditioning circuits. Low-Power Analog Tech Sensors Mob Devices Energy Effic Amplifiers. https://doi.org/10.1007/978-3-319-97870-3_1
Chen Z, Yang Y, Lu Z, Luo Y (2013) Broadband characteristics of vibration energy harvesting using one-dimensional phononic piezoelectric cantilever beams. Phys B Condens Matter 410(1):5–12. https://doi.org/10.1016/j.physb.2012.10.029
Chen J, Huang Y, Zhang N, Zou H, Liu R, Tao C, Fan X, Wang ZL (2016) Micro-cable structured textile for simultaneously harvesting solar and mechanical energy. Nat Energy 1(10):1–8. https://doi.org/10.1038/nenergy.2016.138
Chidambaram N, Mazzalai A, Muralt P (2012) Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes. In: Proc. 2012 21st IEEE Int. Symp. Appl. Ferroelectr. held jointly with 11th IEEE Eur. Conf. Appl. Polar Dielectr. IEEE PFM, ISAF/ECAPD/PFM, pp 8–11, 2012. https://doi.org/10.1109/ISAF.2012.6297833
Chidambaram N, Mazzalai A, Balma D, Muralt P (2013) Comparison of lead Zirconate Titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes. IEEE Trans Ultrason Ferroelectr Freq Control 60(8):1564–1571. https://doi.org/10.1109/TUFFC.2013.2736
Chiu Y, Wu SH (2013) Flexible electret energy harvesters with parylene electret on PDMS substrates. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/476/1/012037
Chiu Y, Lee MH, Hsu WH (2014) Flexible electret energy harvester with copper mesh electrodes. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/557/1/012072
Choi YS, Jing Q, Datta A, Boughey C, Kar-Narayan S (2017) A triboelectric generator based on self-poled Nylon-11 nanowires fabricated by gas-flow assisted template wetting. Energy Environ Sci 10(10):2180–2189. https://doi.org/10.1039/c7ee01292f
Chun J, Ye BU, Lee JW, Choi D, Kang CY, Kim SW, Wang ZL, Baik JM (2016) Boosted output performance of triboelectric nanogenerator via electric double layer effect. Nat Commun 7(May):1–9. https://doi.org/10.1038/ncomms12985
Covaci C, Gontean A (2020) Piezoelectric energy harvesting solutions: a review. Sensors (switzerland) 20(12):1–37. https://doi.org/10.3390/s20123512
Davies DK (1969) Charge generation on dielectric surfaces. J Phys D Appl Phys 2(11):1533–1537. https://doi.org/10.1088/0022-3727/2/11/307
Deng L, Fang Y, Wang D, Wen Z (2018) A MEMS based piezoelectric vibration energy harvester for fault monitoring system. Microsyst Technol 24(9):3637–3644. https://doi.org/10.1007/s00542-018-3784-7
Deutz DB, Pascoe JA, Schelen B, Van Der Zwaag S, De Leeuw DM, Groen P (2018) Analysis and experimental validation of the figure of merit for piezoelectric energy harvesters. Mater Horizons 5(3):444–453. https://doi.org/10.1039/c8mh00097b
Dhone MD, Gawatre PG, Balpande SS (2018) Frequency band widening technique for cantilever-based vibration energy harvesters through dynamics of fluid motion. Mater Sci Energy Technol 1(1):84–90. https://doi.org/10.1016/j.mset.2018.06.002
Diaz AF, Guay J (1993) Contact charging of organic materials: ion vs. electron transfer. IBM J Res Dev 37(2):249–259. https://doi.org/10.1147/rd.372.0249
Dong K, Deng J, Zi Y, Wang YC, Xu C, Zou H, Ding W, Dai Y, Gu B, Sun B, Wang ZL (2017) 3D Orthogonal woven triboelectric nanogenerator for effective biomechanical energy harvesting and as self-powered active motion sensors. Adv Mater 29(38):1–11. https://doi.org/10.1002/adma.201702648
Dong L, Han X, Xu Z, Closson AB, Liu Y, Wen C, Liu X, Escobar GP, Oglesby M, Feldman M, Chen Z, Zhang JXJ (2019) Flexible porous piezoelectric cantilever on a pacemaker lead for compact energy harvesting. Adv Mater Technol 4(1):1–9. https://doi.org/10.1002/admt.201800148
Elahi H, Munir K, Eugeni M, Atek S, Gaudenzi P (2020) Energy harvesting towards self-powered IoT devices. Energies 13(21):1–31. https://doi.org/10.3390/en13215528
Esashi M, Takinami M, Wakabayashi Y, Minami K (1995) High-rate directional deep dry etching for bulk silicon micromachining. J Micromech Microeng 5(1):5–10. https://doi.org/10.1088/0960-1317/5/1/002
Faisal A, Annus P, Le Moullec Y (2015) Energy harvesting technologies: potential application to wearable health-monitoring. Isbem 2015
Feenstra J, Granstrom J, Sodano H (2008) Energy harvesting through a backpack employing a mechanically amplified piezoelectric stack. Mech Syst Signal Process 22(3):721–734. https://doi.org/10.1016/j.ymssp.2007.09.015
Ghaffarinejad A, Hasani JY, Hinchet R, Lu Y, Zhang H, Karami A, Galayko D, Kim SW, Basset P (2018) A conditioning circuit with exponential enhancement of output energy for triboelectric nanogenerator. Nano Energy 51:173–184. https://doi.org/10.1016/j.nanoen.2018.06.034
Ghomian T, Mehraeen S (2019) Survey of energy scavenging for wearable and implantable devices. Energy 178:33–49. https://doi.org/10.1016/j.energy.2019.04.088
Gosavi SK, Balpande SS (2019) A comprehensive review of micro and nano scale piezoelectric energy harvesters. Sens Lett 17(3):180–195. https://doi.org/10.1166/sl.2019.4081
Gowthaman S, Chidambaram GS, Rao DBG, Subramya HV, Chandrasekhar U (2016) A review on energy harvesting using 3D printed fabrics for wearable electronics. J Inst Eng Ser C 99(4):435–447. https://doi.org/10.1007/s40032-016-0267-4
Guo Y (2010) Selected topics in micro/nano-robotics for biomedical applications. Sel Top Micro/nano-Robotics Biomed Appl 9781441984:1–193. https://doi.org/10.1007/978-1-4419-8411-1
Hadimani RL, Bayramol DV, Sion N, Shah T, Qian L (2013) Continuous production of piezoelectric PVDF fibre for e-textile applications. Smart Mater Struct. https://doi.org/10.1088/0964-1726/22/7/075017
Han Y, Cao Y, Zhao J, Yin Y, Ye L, Wang X, You Z (2016) A self-powered insole for humanmotion recognition. Sensors (switzerland) 16(9):1–12. https://doi.org/10.3390/s16091502
He C, Wang ZL (2018) Triboelectric nanogenerator as a new technology for effective PM2.5 removing with zero ozone emission. Prog Nat Sci Mater Int 28(2):99–112. https://doi.org/10.1016/j.pnsc.2018.01.017
Henniker J (1962) Triboelectricity in polymers. Nature 196:474
Hong D, Choi YM, Jang Y, Jeong J (2018) A multilayer thin-film screen-printed triboelectric nanogenerator. Int J Energy Res 42(11):1–8. https://doi.org/10.1002/er.4092
Howells CA (2009) Piezoelectric energy harvesting. Energy Convers Manag 50(7):1847–1850. https://doi.org/10.1016/j.enconman.2009.02.020
Iannacci J (2019) Microsystem based Energy Harvesting (EH-MEMS): powering pervasivity of the Internet of Things (IoT) – a review with focus on mechanical vibrations. J King Saud Univ - Sci 31(1):66–74. https://doi.org/10.1016/j.jksus.2017.05.019
Jagtap SN, Paily R (2011) Geometry optimization of a MEMS-based energy harvesting device. In: TechSym 2011 - Proc. 2011 IEEE Students’ Technol. Symp, pp 265–269, 2011, https://doi.org/10.1109/TECHSYM.2011.5783827
Jenkins K, Nguyen V, Zhu R, Yang R (2015) Piezotronic effect: An emerging mechanism for sensing applications. Sensors (switzerland) 15(9):22914–22940. https://doi.org/10.3390/s150922914
Judy JW (2001) Microelectromechanical systems (MEMS): fabrication, design and applications. Smart Mater Struct 10(6):1115–1134. https://doi.org/10.1088/0964-1726/10/6/301
Kanno I (2015) Piezoelectric MEMS for energy harvesting. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/660/1/012001
Kawa B, Śliwa K, Lee VCh, Shi Q, Walczak R (2020) Inkjet 3D printed MEMS vibrational electromagnetic energy harvester. Energies 13(11):1–10. https://doi.org/10.3390/s20071849
Khan U, Hinchet R, Ryu H, Kim SW (2017) Research Update: Nanogenerators for self-powered autonomous wireless sensors. APL Mater. https://doi.org/10.1063/1.4979954
Kim DW, Kim SW, Jeong U (2018) Lipids: source of static electricity of regenerative natural substances and nondestructive energy harvesting. Adv Mater 30(52):1–6. https://doi.org/10.1002/adma.201804949
Kim DW, Lee JH, Kim JK, Jeong U (2020) Material aspects of triboelectric energy generation and sensors. NPG Asia Mater. https://doi.org/10.1038/s41427-019-0176-0
Kim MP, Um DS, Shin YE, Ko H (2021) High-performance triboelectric devices via dielectric polarization: a review. Nanoscale Res Lett 16(1):1–14. https://doi.org/10.1186/s11671-021-03492-4
Kumar S, Katoria D, Sehgal D (2013) Environment impact assessment of thermal power plant for sustainable development. Int J Environ Eng Manag 4(6):567–572
Lee S, Ko W, Oh Y, Lee J, Baek G, Lee Y, Sohn J, Cha S, Kim J, Park J, Hong J (2015) Triboelectric energy harvester based on wearable textile platforms employing various surface morphologies. Nano Energy 12:410–418. https://doi.org/10.1016/j.nanoen.2015.01.009
Lee JW, Cho HJ, Chun J, Kim KN, Kim S, Ahn CW, Kim IW, Kim JY, Kim SW, Yang C, Baik JM (2017) Robust nanogenerators based on graft copolymers via control of dielectrics for remarkable output power enhancement. Sci Adv 3(5):1–10. https://doi.org/10.1126/sciadv.1602902
Li H, Tian C, Deng ZD (2014) Energy harvesting from low frequency applications using piezoelectric materials. Appl Phys Rev 1(4):20. https://doi.org/10.1063/1.4900845
Li C, Cao R, Zhang X (2018) Breathable materials for triboelectric effect-based wearable electronics. Appl Sci. https://doi.org/10.3390/app8122485
Lin L, Xie Y, Wang S, Wu W, Niu S, Wen X, Wang ZL (2013) Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging. ACS Nano 7(9):8266–8274. https://doi.org/10.1021/nn4037514
Lin Z, Chen J, Yang J (2016) Recent progress in triboelectric nanogenerators as a renewable and sustainable power source. J Nanomater. https://doi.org/10.1155/2016/5651613
Liu JQ, Bin Fang H, Xu ZY, Mao XH, Shen XC, Chen D, Liao H, Cai BC (2008) A MEMS-based piezoelectric power generator array for vibration energy harvesting. Microelectronics J 39(5):802–806
Liu P, Gao Z, Xu L, Shi X, Fu X, Li K, Zhang B, Sun X, Peng H (2018) Polymer solar cell textiles with interlaced cathode and anode fibers. J Mater Chem A 6(41):19947–19953. https://doi.org/10.1039/c8ta06510a
Liu J, Gu L, Cui N, Xu Q, Qin Y, Yang R (2019) Fabric-based triboelectric nanogenerators. Research 2019:1–13. https://doi.org/10.34133/2019/1091632
Lu F, Lee HP, Lim SP (2004) Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications. Smart Mater Struct 13(1):57–63. https://doi.org/10.1088/0964-1726/13/1/007
Lu S, Lei W, Gao L, Chen X, Tong D, Yuan P, Mu X, Yu H (2021) Regulating the high-voltage and high-impedance characteristics of triboelectric nanogenerator toward practical self-powered sensors. Nano Energy 87:106137. https://doi.org/10.1016/j.nanoen.2021.106137
Lussenburg K, Van Der Velden N, Doubrovski Z, Geraedts J, Karana E (2014) Designing with 3D Printed Textiles. In: 5th International Conference on Additive Technologies, pp 74–81
Mo C, Arnold D, Kinsel WC, Clark WW (2013) Modeling and experimental validation of unimorph piezoelectric cymbal design in energy harvesting. J Intell Mater Syst Struct 24(7):828–836. https://doi.org/10.1177/1045389X12463459
Muhammad F, Waleed Raza M, Khan S, Ahmed A (2017) Low efficiency of the photovoltaic cells: causes and impacts. Int J Sci Eng Res 8(11):1201–1207
Nechibvute A, Chawanda A, Luhanga P (2012) Piezoelectric energy harvesting devices: an alternative energy source for wireless sensors. Smart Mater Res 2012:1–13. https://doi.org/10.1155/2012/853481
Nguyen CH, Hanke U, Halvorsen E (2018) Actuation of Piezoelectric Layered Beams with d31 and d33 Coupling. IEEE Trans Ultrason Ferroelectr Freq Control 65(5):815–827. https://doi.org/10.1109/TUFFC.2018.2808239
Nilsson E, Mateu L, Spies P, Hagström B (2014) Energy harvesting from piezoelectric textile fibers. Procedia Eng 87:1569–1572. https://doi.org/10.1016/j.proeng.2014.11.600
Nisanth A, Suja KJ, Seena V (2020) Design and optimization of MEMS piezoelectric energy harvester for low frequency applications. Microsyst Technol. https://doi.org/10.1007/s00542-020-04944-0
Nisanth A, Suja KJ, Seena V (2021) Design and optimization of MEMS piezoelectric energy harvester for low frequency applications. Microsyst Technol 27(1):251–261. https://doi.org/10.1007/s00542-020-04944-0
Niu S, Liu Y, Wang S, Lin L, Zhou YS, Hu Y, Wang ZL (2013) Theory of sliding-mode triboelectric nanogenerators. Adv Mater 25(43):6184–6193. https://doi.org/10.1002/adma.201302808
Niu S, Wang X, Yi F, Zhou YS, Wang ZL (2015) A universal self-charging system driven by random biomechanical energy for sustainable operation of mobile electronics. Nat Commun. https://doi.org/10.1038/ncomms9975
Palosaari J, Leinonen M, Juuti J, Jantunen H (2018) The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever. Mech Syst Signal Process 106:114–118. https://doi.org/10.1016/j.ymssp.2017.12.029
Pan C, Guo W, Dong L, Zhu G, Wang ZL (2012) Optical fiber-based core-shell coaxially structured hybrid cells for self-powered nanosystems. Adv Mater 24(25):3356–3361. https://doi.org/10.1002/adma.201201315
Pan M, Yuan C, Liang X, Zou J, Zhang Y, Bowen C (2020) Triboelectric and piezoelectric nanogenerators for future soft robots and machines. iScience 23(11):101682. https://doi.org/10.1016/j.isci.2020.101682
Peng H, Wen DL, Yu Q, Yang M-H, Cheng T, Zhang XS (2021) Textile-based triboelectric nanogenerators for wearable. Micromachines 12(158):1–21
Priya S (2007) Advances in energy harvesting using low profile piezoelectric transducers. J Electroceramics 19(1):165–182. https://doi.org/10.1007/s10832-007-9043-4
Pu X, Li L, Liu M, Jiang C, Du C, Zhao Z, Hu W, Wang ZL (2016) Wearable self-charging power textile based on flexible yarn supercapacitors and fabric nanogenerators. Adv Mater 28(1):98–105. https://doi.org/10.1002/adma.201504403
Rodrigues C, Gomes A, Ghosh A, Pereira A, Ventura J (2019) Power-generating footwear based on a triboelectric-electromagnetic-piezoelectric hybrid nanogenerator. Nano Energy 62:660–666. https://doi.org/10.1016/j.nanoen.2019.05.063
Romero E (2013) Enabling technologies. Powering Biomed Devices 2005:31–46. https://doi.org/10.1016/b978-0-12-407783-6.00003-5
Roscow JI, Lewis RWC, Taylor J, Bowen CR (2017) Modelling and fabrication of porous sandwich layer barium titanate with improved piezoelectric energy harvesting figures of merit. Acta Mater 128:207–217. https://doi.org/10.1016/j.actamat.2017.02.029
Roscow JI, Pearce H, Khanbareh H, Kar-Narayan S, Bowen CR (2019) Modified energy harvesting figures of merit for stress- and strain-driven piezoelectric systems. Eur Phys J Spec Top 228(7):1537–1554. https://doi.org/10.1140/epjst/e2019-800143-7
Roundy S, Wright PK, Rabaey J (2003) A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun 26(11):1131–1144. https://doi.org/10.1016/S0140-3664(02)00248-7
Ryu H, Lee JH, Kim TY, Khan U, Lee JH, Kwak SS, Yoon HJ, Kim SW (2017) High-performance triboelectric nanogenerators based on solid polymer electrolytes with asymmetric pairing of ions. Adv Energy Mater 7(17):1–6. https://doi.org/10.1002/aenm.201700289
Saadon S, Sidek O (2015) Micro-electro-mechanical system (MEMS)-based piezoelectric energy harvester for ambient vibrations. Procedia - Soc Behav Sci 195:2353–2362. https://doi.org/10.1016/j.sbspro.2015.06.198
Safaei M, Sodano HA, Anton SR (2019) A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018). Smart Mater Struct. https://doi.org/10.1088/1361-665X/ab36e4
Sakaguchi M, Makino M, Ohura T, Iwata T (2014) Contact electrification of polymers due to electron transfer among mechano anions, mechano cations and mechano radicals. J Electrostat 72(5):412–416. https://doi.org/10.1016/j.elstat.2014.06.006
Satharasinghe A, Hughes-Riley T, Dias T (2020) A review of solar energy harvesting electronic textiles. Sensors (switzerland) 20(20):1–39. https://doi.org/10.3390/s20205938
Seol M, Kim S, Cho Y, Byun KE, Kim H, Kim J, Kim SK, Kim SW, Shin HJ, Park S (2018a) Triboelectric Series of 2D Layered Materials. Adv Mater 30(39):1–8. https://doi.org/10.1002/adma.201801210
Seol ML, Ivaškevičiūtė R, Ciappesoni MA, Thompson FV, Il Moon D, Kim SJ, Kim SJ, Han JW, Meyyappan M (2018b) All 3D printed energy harvester for autonomous and sustainable resource utilization. Nano Energy 52:271–278
Seung W, Gupta MK, Lee KY, Shin K, Lee J, Kim TY, Kim S, Lin J, Kim JH, Kim S (2015) Nanopatterned textile-based. ACS Nano 9(4):1–9
Shaikh FK, Zeadally S (2016) Energy harvesting in wireless sensor networks: a comprehensive review. Renew Sustain Energy Rev 55:1041–1054. https://doi.org/10.1016/j.rser.2015.11.010
Shi B, Liu Z, Zheng Q, Meng J, Ouyang H, Zou Y, Jiang D, Qu X, Yu M, Zhao L, Fan Y, Wang ZL, Li Z (2019) Body-integrated self-powered system for wearable and implantable applications. ACS Nano 13(5):6017–6024. https://doi.org/10.1021/acsnano.9b02233
Singh SK, Kumar P, Magdum R, Khandelwal U, Deswal S, More Y, Muduli S, Boomishankar R, Pandit S, Ogale S (2019) Seed power: natural seed and electrospun Poly(vinyl difluoride) (PVDF) nanofiber based triboelectric nanogenerators with high output power density. ACS Appl Bio Mater 2(8):3164–3170. https://doi.org/10.1021/acsabm.9b00348
Singh R, Pant BD, Jain A (2020) Simulations, fabrication, and characterization of d 31 mode piezoelectric vibration energy harvester. Microsyst Technol 26(5):1499–1505. https://doi.org/10.1007/s00542-019-04684-w
Slabov V, Kopyl S, Soares MP (2020) Natural and eco - friendly materials for triboelectric energy harvesting. Nano-Micro Lett 12(1):1–18. https://doi.org/10.1007/s40820-020-0373-y
Soin N, Shah TH, Anand SC, Geng J, Pornwannachai W, Mandal P, Reid D, Sharma S, Hadimani RL, Bayramol DV, Siores E (2014) Novel ‘3-D spacer’ all fibre piezoelectric textiles for energy harvesting applications. Energy Environ Sci 7(5):1670–1679. https://doi.org/10.1039/c3ee43987a
Soin N, Anand SC, Shah TH (2016) Energy harvesting and storage textiles, 2nd edn. Elsevier Ltd.
Song JH, Kim YT, Cho S, Song WJ, Moon S, Park CG, Park S, Myoung JM, Jeong U (2017) Surface-embedded stretchable electrodes by direct printing and their uses to fabricate ultrathin vibration sensors and circuits for 3D structures. Adv Mater 29(43):1–7. https://doi.org/10.1002/adma.201702625
Starner TE, Paradiso JA (2004) Human-generated power for mobile electronics, no. July 2014
Steffel C (2021) 3D printed piezoelectric materials line up for medical applications. IOP publishing. https://physicsworld.com/a/3d-printed-piezoelectric-materials-line-up-for-medical-applications/. Accessed 12 Sep 2021
Thainiramit P, Yingyong P, Isarakorn D (2020) Impact-driven energy harvesting: piezoelectric versus triboelectric energy harvesters. Sensors (switzerland) 20(20):1–20. https://doi.org/10.3390/s20205828
Torah R, Lawrie-Ashton J, Li Y, Arumugam S, Sodano HA, Beeby S (2018) Energy-harvesting materials for smart fabrics and textiles. MRS Bull 43(3):214–219. https://doi.org/10.1557/mrs.2018.9
Toshiyoshi H, Ju S, Honma H, Ji CH, Fujita H (2019) MEMS vibrational energy harvesters. Sci Technol Adv Mater 20(1):124–143. https://doi.org/10.1080/14686996.2019.1569828
Toyabur RM, Kim JW, Park JY (2018) A hybrid piezoelectric and electromagnetic energy harvester for scavenging low frequency ambient vibrations. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/1052/1/012051
“Triboelectric effect.” https://www.sciencedaily.com/terms/triboelectric_effect.htm
Vivekananthan V, Chandrasekhar A, Alluri NR, Purusothaman Y, Khandelwal G, Kim S (2019) Triboelectric nanogenerators: design, fabrication, energy harvesting, and portable- wearable applications. Nanogenerators. Intech, pp 1–18
Walden S (2021) The ‘Indoor Generation’ and the health risks of spending more time inside. VELUX. https://www.usatoday.com/story/sponsor-story/velux/2018/05/15/indoor-generation-and-health-risks-spending-more-time-inside/610289002/. Accessed 12 Sep 2021
Wang ZL (2017) On Maxwell’s displacement current for energy and sensors: the origin of nanogenerators. Mater Today 20(2):74–82. https://doi.org/10.1016/j.mattod.2016.12.001
Wang S, Lin L, Wang ZL (2012) Nanoscale triboelectric-effect-enabled energy conversion for sustainably powering portable electronics. Nano Lett 12(12):6339–6346. https://doi.org/10.1021/nl303573d
Wang ZL, Lin L, Chen J, Niu S, Zi Y (2016) Triboelectric nanogenerator: single-electrode mode. Springer International Publishing, pp 91–107
Wei C, Jing X (2017) A comprehensive review on vibration energy harvesting: modelling and realization. Renew Sustain Energy Rev 74(2016):1–18. https://doi.org/10.1016/j.rser.2017.01.073
Xiong J, Lee PS (2019) Progress on wearable triboelectric nanogenerators in shapes of fiber, yarn, and textile. Sci Technol Adv Mater 20(1):837–857. https://doi.org/10.1080/14686996.2019.1650396
Xu R, Kim SG (2012) Figures of merits of piezoelectric materials in energy. PowerMEMS, no. October, pp 464–467
Yang W, Chen J, Zhu G, Wen X, Bai P, Su Y, Lin Y, Wang Z (2013) Harvesting vibration energy by a triple-cantilever based triboelectric nanogenerator. Nano Res 6(12):880–886. https://doi.org/10.1007/s12274-013-0364-0
Yang Z, Zhou S, Zu J, Inman D (2018) High-performance piezoelectric energy harvesters and their applications. Joule. https://doi.org/10.1016/j.joule.2018.03.011
Yeo HG, Xue T, Roundy S, Ma X, Rahn C, Trolier-McKinstry S (2018) Strongly (001) Oriented Bimorph PZT film on metal foils grown by rf-sputtering for Wrist-Worn piezoelectric energy harvesters. Adv Funct Mater 28(36):1–9. https://doi.org/10.1002/adfm.201801327
Yi Z, Yang B, Li G, Liu J, Chen X, Wang X, Yang C (2017) High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate. Appl Phys Lett. https://doi.org/10.1063/1.4991368
Yu H, He X, Ding W, Hu Y, Yang D, Lu S, Wu C, Zou H, Liu R, Lu C, Wang ZL (2017) A self-powered dynamic displacement monitoring system based on triboelectric accelerometer. Adv Energy Mater 7(19):1–8. https://doi.org/10.1002/aenm.201700565
Zhang K, Wang X, Yang Y, Wang ZL (2015) Hybridized electromagnetic-triboelectric nanogenerator for scavenging biomechanical energy for sustainably powering wearable electronics. ACS Nano 9(4):3521–3529. https://doi.org/10.1021/nn507455f
Zhang N, Chen J, Huang Y, Guo W, Yang J, Du J, Fan X, Tao C (2016) A wearable all-solid photovoltaic textile. Adv Mater 28(2):263–269. https://doi.org/10.1002/adma.201504137
Zhang G, Gao S, Liu H, Niu S (2017) A low frequency piezoelectric energy harvester with trapezoidal cantilever beam: theory and experiment. Microsyst Technol 23(8):3457–3466. https://doi.org/10.1007/s00542-016-3224-5
Zhang R, Örtegren J, Hummelgård M, Olsen M, Andersson H, Olin H (2018) Harvesting triboelectricity from the human body using non-electrode triboelectric nanogenerators. Nano Energy 45:298–303. https://doi.org/10.1016/j.nanoen.2017.12.053
Zhao C, Zhang Q, Zhang W, Du X, Zhang Y, Gong S, Ren K, Sun Q, Wang ZL (2019) Hybrid piezo/triboelectric nanogenerator for highly efficient and stable rotation energy harvesting. Nano Energy 57(Nov 2018):440–449. https://doi.org/10.1016/j.nanoen.2018.12.062
Zheng Q, Shi B, Li Z, Wang ZL (2017) Recent progress on piezoelectric and triboelectric energy harvesters in biomedical systems. Adv Sci 4(7):1–23. https://doi.org/10.1002/advs.201700029
Zhu G, Lin ZH, Jing Q, Bai P, Pan C, Yang Y, Zhou Y, Wang ZL (2013a) Toward large-scale energy harvesting by a nanoparticle-enhanced triboelectric nanogenerator. Nano Lett 13(2):847–853. https://doi.org/10.1021/nl4001053
Zhu G, Bai P, Chen J, Lin Wang Z (2013b) Power-generating shoe insole based on triboelectric nanogenerators for self-powered consumer electronics. Nano Energy 2(5):688–692
Zhu M, Yi Z, Yang B, Lee C (2021) Making use of nanoenergy from human – nanogenerator and self-powered sensor enabled sustainable wireless IoT sensory systems. Nano Today 36(800):101016. https://doi.org/10.1016/j.nantod.2020.101016
Zou H, Zhang Y, Guo L, Wang P, He X, Dai G, Zheng H, Chen C, Wang AC, Xu C, Wang ZL (2019) Quantifying the triboelectric series. Nat Commun 10(1):1–9. https://doi.org/10.1038/s41467-019-09461-x
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Kahar, K., Bhaiyya, M., Dhekekar, R. et al. MEMS-based energy scavengers: journey and future. Microsyst Technol 28, 1971–1993 (2022). https://doi.org/10.1007/s00542-022-05356-y
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DOI: https://doi.org/10.1007/s00542-022-05356-y