Abstract
Laser machining is extensively used in manufacturing processes. In particular, a highly focused laser machining is a noteworthy technology because its laser system can focus the laser beam into a tiny spot, unlike an optical scanner laser system. With a highly focused laser, high-quality and precise machining can be realized. Notably, aside from the machining quality, speed performance is also an important aspect in enhancing the productivity of the machinery. Therefore, a high-performance motion stage that controls the planar motion of the machining tools, such as a laser beam, is required. This paper presents a high-speed, short-stroke xy-stage that has a parallel axis arrangement, direct-driving linear motors, and a counterbalance mechanism. Through the counterbalance mechanism, it is possible to prevent the reaction force of each axis actuation unit from being transmitted directly to the base frame and then reduce the vibration of the entire xy-stage. Herein, a prototype is developed and the obtained experimental results are presented.
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This work was supported by National Research Foundation of Korea under Grant 2020R1F1A1075682.
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Yoon, J., Jung, R., Ye, SJ. et al. A high-speed, short-stroke xy-stage with counterbalance mechanisms for highly focused laser machining. Microsyst Technol 28, 2361–2368 (2022). https://doi.org/10.1007/s00542-022-05352-2
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DOI: https://doi.org/10.1007/s00542-022-05352-2