Abstract
The rising demand for mobile devices with photo cameras that has the same stability as that of a high-end camera has led to the need for introducing image stabilizing devices that must be inexpensive and efficient. This problem is often addressed using miniature Micro-Electro-Mechanical Sensors (MEMS). The application of resonance MEMS as inertial sensors in navigation systems of low accuracy grade is also relevant. Such devices are manufactured using well-developed microelectronic technologies of silicon processing to obtain layers up to 100 µm thick. Today, much attention is paid to the issues of a sensitive element development for a MEMS gyro with high sensitivity and a minimum possible size. This paper reports one such comb driven, single perforated proof mass MEMS-based Tuning-Fork Gyroscope (TFG) using PolyMUMPs process. In this paper, initially, a full description of design and simulation is done using predictive modelling methods. We propose a miniature perforated mass sized 500*500 µm, highly sensitive to the input signal, with small displacements along the axis of primary oscillations. The value of this work is that it considers a full cycle of a MEMS-based gyroscope’s design, starting from the mathematical model description and up to the study of a manufactured prototype.
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Acknowledgement
We acknowledge the National Program on Micro and Smart Systems (NPMASS) Program for the establishment of National MEMS Design Centre (NMDC) at Rajalakshmi Engineering College. We would also like to thank Dr Rudra Pratap (Professor of Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore who gave us sufficient knowledge on TFG.
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Selvakumar, V.S., Sujatha, L. & Balasubramanian, V. Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs. Microsyst Technol 27, 2847–2855 (2021). https://doi.org/10.1007/s00542-020-05129-5
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DOI: https://doi.org/10.1007/s00542-020-05129-5