Abstract
The temperature influence is one of the main factors affecting the accuracy improvement of the MEMS resonant sensor. For the electrothermally excited MEMS resonant sensor, temperature influence not only comes from the inherent thermal temperature rise, but also depends on the change of ambient temperature. However, due to the complex structure, different material properties and size error of the sensor, it is difficult to establish the theoretical model of temperature influence to provide reference for the material selection and optimization design of structural parameter for the sensor. For the electrothermally excited MEMS resonant sensor, finite element method (FEM) is used to establish the model of temperature influence and study the influence of ambient temperature and the inherent thermal temperature rise. Experiment platform was built, and the influence experiment of the inherent thermal temperature rise and the ambient temperature was conducted to verify the results of FEM simulation. And the FEM simulation results and experiment results are in good agreement. The FEM simulation and the results obtained by this method could provide an important reference for material selection and structural parameter optimization design of the electrothermally excited MEMS resonant sensor.
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Financial support for this study was provided by National Key Research and Development Project (2019YFB2006602), Chinese Defense Industrial Technology Development Program (JCKY2018205C003), and National Natural Science Foundation of China (61703270).
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Shi, H., Zhu, G., Cao, L. et al. Study on temperature influence of an electrothermally excited MEMS resonant sensor based on finite element method. Microsyst Technol 27, 2705–2714 (2021). https://doi.org/10.1007/s00542-020-05060-9
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DOI: https://doi.org/10.1007/s00542-020-05060-9