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Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

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Abstract

Fabrication of high aspect ratio microelectromechanical systems (MEMS) like comb drive structures are mostly done by DRIE (Deep Reactive Ion Etching) process. Bosch process is a type of DRIE which involves alternate repetition of plasma etching and side wall passivation to achieve deep vertical structures. A continued plasma etching may lead to tapered wall due to some lateral etching. Although, a straight and smooth wall is expected due to combined alternate processes of etching and passivation, very often the resulting walls are having surface undulations called as scalloping. So, due to slanting, scalloping and combined slanting and scalloping defects the working and performance of a MEMS device get affected. MEMS gyrocope is one such widely comercialized device, which is required to measure angular rotation wth certain accuracy. We take a simple single-axis MEMS vibratory gyroscope to study the effect on these defects on its dynamics performance. The study presented in the paper may be useful for including undesirable effects in designing MEMS vibratory gyroscopes.

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Acknowledgements

Arnab acknowledge the Ministry of Human Resource Development (MHRD), New Delhi for the fellowship. The work is partially supported by RCI, Hyderabad.

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Authors and Affiliations

  1. Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Kandi, Sangareddy, Hyderabad, TS, 502285, India

    Arnab Biswas, Vishal S. Pawar & Ashok Kumar Pandey

  2. Research Centre Imarat, Hyderabad, India

    P. Krishna Menon

  3. Department of Physics, Indian Institute of Technology Hyderabad, Kandi, Sangareddy, Hyderabad, TS, 502285, India

    Prem Pal

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  1. Arnab Biswas
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  2. Vishal S. Pawar
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  3. P. Krishna Menon
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  4. Prem Pal
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  5. Ashok Kumar Pandey
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Correspondence to Ashok Kumar Pandey.

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Biswas et al.: Effect of Fabrication Defects on the Performance Parameters of a MEMS Gyroscope.

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Biswas, A., Pawar, V.S., Menon, P.K. et al. Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope. Microsyst Technol 27, 2679–2693 (2021). https://doi.org/10.1007/s00542-020-05059-2

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