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Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity

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Abstract

The mechanical sensitivity (\(S_{mech}\)) is an important performance for ring-like disk resonator gyroscope (RDRG). To provide guidelines for improving \(S_{mech}\), the reliable expression of \(S_{mech}\) is derived by taking into account frequency split and difference of effective mass. The design strategy indicates the main way to improve \(S_{mech}\) is reducing effective stiffness and frequency split. Then a novel gear-like disk resonator gyroscope (GDRG) is designed by replacing circular rings of RDRG with meander-shaped rings consisting of linear beams. Afterwards, the characteristics between RDRG and GDRG are compared. For gyroscopes fabricated ideally, GDRG has a decrease of 58.40% on effective stiffness, an increase of 49.51% on quality factor (Q) and an increase of 694.28% on \(S_{mech}\), comparing with RDRG. For actual fabricated gyroscopes, GDRG has much less frequency split than RDRG due to its much higher immunity to crystal orientation error and fabrication errors. Affected by these errors, effective stiffness and Q have small deviations from the values of gyroscopes fabricated ideally, \(S_{mech}\) decreases greatly and \(S_{mech}\) of GDRG is always much higher than that of RDRG. These results have verified GDRG can achieve high \(S_{mech}\) due to its small effective stiffness, small frequency split and high Q. The ideas and methods described in this paper can also be applied to other similar gyroscopes.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant no. 61574093), the National Key Laboratory Fund (Grant no. 614280504010317) and Professional Technical Service Platform of Shanghai (Grant no. 19DZ2291103).

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai, 200240, China

    Jun Feng, Weiping Zhang, Liutao Gu & Zhaoyang Liu

  2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Jun Feng, Liutao Gu & Zhaoyang Liu

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  1. Jun Feng
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  2. Weiping Zhang
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  3. Liutao Gu
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  4. Zhaoyang Liu
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Correspondence to Weiping Zhang.

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Feng, J., Zhang, W., Gu, L. et al. Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity. Microsyst Technol 27, 2715–2722 (2021). https://doi.org/10.1007/s00542-020-05047-6

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  • DOI: https://doi.org/10.1007/s00542-020-05047-6

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