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Characterization of nanogenerators based on S-doped zinc oxide nanorod arrays

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Abstract

Nanogenerators (NGs) synthesized with sulfur (S) doped zinc oxide (ZnO) nanorods (NRs) by a hydrothermal method were characterized for their performances in this study. The NG formation steps consist of (1) growing the S-doped ZnO NRs on an indium-tin-oxide (ITO) glass substrate, (2) employing an ITO etching paste to create the electrode pattern, and (3) depositing an electrode of aluminum (Al) film on the ITO glass substrate by a radio-frequency magnetron sputtering technique for the final NG assembly. As found, the ZnO NRs doped with 5 at.% S exhibit the best efficiency among all S-doped ZnO NRs, with the optimal operational outputs of 150 mV, 0.16 μA, and 24 nW, respectively.

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Acknowledgements

This work was financially supported by the Ministry of Science and Technology of Taiwan with Project Number: MOST 107-2221-E-150-032, MOST 108-2221-E-024-006, and MOST 108-2221-E-150-013-MY2. The authors would also like to thank the assistance of the Common Laboratory for Micro/Nano Science and Technology of the National Formosa University for some of the measurement equipment used in this work, the Center for Micro/Nano Science and Technology of National Cheng Kung University for device characterization, and B. W. Huang for device fabrication.

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Authors and Affiliations

  1. Fujian University of Technology, Fuzhou, 350108, Fujian, China

    Kin-Tak Lam

  2. Department of Electro-Optical Engineering and Institute of Electro-Optical and Materials Science, National Formosa University, No. 64, Wenhua Rd., Huwei, Yunlin, 632, Taiwan, ROC

    Yen-Lin Chu, Liang-Wen Ji & Bo-Wei Huang

  3. Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, 710, Taiwan, ROC

    Yu-Jen Hsiao

  4. Department of Mechanical Automation Engineering, Kao Yuan University, Kaohsiung, 821, Taiwan, ROC

    Tung-Te Chu

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  1. Kin-Tak Lam
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Correspondence to Yen-Lin Chu or Liang-Wen Ji.

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Lam, KT., Chu, YL., Ji, LW. et al. Characterization of nanogenerators based on S-doped zinc oxide nanorod arrays. Microsyst Technol 28, 395–401 (2022). https://doi.org/10.1007/s00542-020-04863-0

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  • DOI: https://doi.org/10.1007/s00542-020-04863-0

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