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Hybrid lubricant film with high bonding ratio and high coverage

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Abstract

A hybrid lubricant film was prepared from the perfluoropolyether (PFPE) lubricant (Moresco DDOH), with a single end group, and a PFPE film obtained by depositing the HT170 film via photoelectron-assisted chemical vapor deposition (PACVD). The frictional properties of the prepared film were evaluated using a pin-on-disk tester and compared with those of a Z-tetraol dip-coated film. This hybrid lubricant film showed a considerably high bonding ratio of ~ 100% after Vertrel rinsing and lower surface energy than those of Z-tetraol. The frictional coefficient of only the PACVD-treated HT170 film was considerably high. However, the hybrid lubricant film without the mobile fraction showed a friction coefficient equivalent to that of the Z-tetraol film having a mobile fraction of 40%.

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Acknowledgement

This work was financially supported by KAKENHI Grant No. 17K06131 from the Ministry of Education, Culture, Sports, Science and Technology (MEXT) and Kansai University’s grant to Research Group on Tribotronics of ORDIST.

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Authors and Affiliations

  1. Kansai University, Suita-shi, Osaka, 564-8680, Japan

    Hiroshi Tani, Reguo Lu, Shinji Koganezawa & Norio Tagawa

  2. Graduate School of Kansai University, Suita-shi, Osaka, 564-8680, Japan

    Yuki Uesaraie

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  1. Hiroshi Tani
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  2. Yuki Uesaraie
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  3. Reguo Lu
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  4. Shinji Koganezawa
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  5. Norio Tagawa
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Correspondence to Hiroshi Tani.

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Tani, H., Uesaraie, Y., Lu, R. et al. Hybrid lubricant film with high bonding ratio and high coverage. Microsyst Technol 26, 3331–3337 (2020). https://doi.org/10.1007/s00542-020-04806-9

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  • DOI: https://doi.org/10.1007/s00542-020-04806-9

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