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Opto-nanomechanical test instrument in mechanical characterization of DLC coated MEMS devices

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Abstract

Nanomechanical test instruments can precisely measure force and displacement and produce repeatable load-unload curves that can be used in characterizing mechanical behaviour at the nanoscale. In this study, a newly developed translucent nanomechanical test instrument was used in deriving reproducible stiffness values for ultra nano crystalline diamond (UNCD)-made atomic force microscope (AFM) cantilevers that are used for mechanical properties characterization of DLC films. The instrument which is calibrated according to the ISO-14577 standard is integrated with nano/micropositioners and multi-view optical microscopes to facilitate precise manipulation of those AFM cantilevers that were dozens of micrometers in size. Experimental results on UNCD-made AFM cantilever stiffness measurements are provided and compared with theoretical and batch production values.

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Authors and Affiliations

  1. Nanometronix LLC, 7400 Bush Lake Drive, Bloomington, MN, USA

    Antanas Daugela & Jurgis Daugela

  2. St. Thomas Academy, 949 Mendota Heights Road, Mendota Heights, MN, USA

    Jurgis Daugela

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  1. Antanas Daugela
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  2. Jurgis Daugela
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Correspondence to Antanas Daugela.

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Daugela, A., Daugela, J. Opto-nanomechanical test instrument in mechanical characterization of DLC coated MEMS devices. Microsyst Technol 26, 3323–3329 (2020). https://doi.org/10.1007/s00542-020-04800-1

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  • DOI: https://doi.org/10.1007/s00542-020-04800-1

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