Abstract
This paper reports on the simulation and analysis of Ohmic SPDT (single pole double throw) switch for telecommunication application. A comparative study is performed by varying the gaps from 3 to 2 μm for three different types of beam materials, namely gold, aluminum, and platinum. The design is based on the series configuration consisting of two cantilever type switches. In order to improve isolation, low-frequency Ohmic SPDT switch is proposed. The main objective of the paper is to achieve low frequency to fit into C-band. By using COMSOL Multiphysics tool, we found pull-in-voltage as 2.8 V at a beam with 0.5 μm. The performance analysis is done by using HFSS tool and is found to perform at 7.3 GHz with isolation of − 43 dB, the return loss and insertion losses are − 21 and − 1.3 dB, respectively.
Similar content being viewed by others
References
Bansal D, Kumar A, Sharma A, Rangra KJ (2014) Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch. Microsyst Technol 21(5):1047–1052. https://doi.org/10.1007/s00542-014-2238-0
Cho IJ, Yoon E (2010) Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold. J Micromech Microeng 20(3):035028. https://doi.org/10.1088/0960-1317/20/3/035028
Daneshmand M, Yan WD, Mansour RR (2007) Thermally actuated multiport RF MEMS switches and their performance in a vacuumed environment. IEEE Trans Microw Theory Tech 55(6):1229–1236. https://doi.org/10.1109/tmtt.2007.897740
Jaiswal A, Dey S, Abegaonkar MP, Koul SK (2018) Design and development of 60 GHz antenna integrated with RF MEMS SPDT switch for transceiver modules. 2018 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT). https://doi.org/10.1109/rfit.2018.8524123
Kaya A, Coskun O (2013) Single-pole double-throw switches for 2.4 GHz transceiver in wireless communication applications. Arab J Sci Eng 38(12):3421–3427. https://doi.org/10.1007/s13369-013-0667-1
Koul SK, Dey S (2014) RF MEMS Single-pole-multi-throw switching circuits. Micro Smart Devices Syst. https://doi.org/10.1007/978-81-322-1913-2_6
Kumar PA, Sravani KG, Guha K, Rao KS (2018) Performance analysis of series: shunt configuration based RF MEMS switch for satellite communication applications. Microsyst Technol. https://doi.org/10.1007/s00542-018-3907-1
Lakshmi Narayana T, Girija Sravani K, Srinivasa Rao K (2017) A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications. Cogent Eng. https://doi.org/10.1080/23311916.2017.1323367
Lee HC, Park JH, Park JY, Nam HJ, Bu JU (2009) Design, fabrication and RF performance of two different types of piezoelectrically actuated ohmic MEMS switches. J Micromech Microeng 15(11):2098–2104
Lucibello A, Marcelli R, Di Paola E, Di Nardo S, Pochesci D, Croci R, Germani C (2016) RF MEMS fabrication in LTCC technology. 2016 Symposium Design Test Integration and Packaging of MEMS/MOEMS (DTIP). https://doi.org/10.1109/dtip.2016.7514866
Maninder K, Bansal D, Soni S, Singh S, Rangra KJ (2018) On characterization of symmetric type capacitive RF MEMS switches. Microsyst Technol. https://doi.org/10.1007/s00542-018-4006-z
Meniconi E, Schoenlinner B, Prechtel U, Hartmann J, Sorrentino R, Ziegler V (2011) Broadband RF-MEMS based switching network for automated measurements of multifeed antennas. https://doi.org/10.23919/EuMC.2011.6101865
Ravirala AK, Srinivasa Rao K et al (2018) Design and performance analysis of uniform meander structured RF MEMS capacitive shunt switch along with perforations. Microsyst Technol 24(2):901–908. https://doi.org/10.1007/s00542-017-3403-z
Sharma U, Kumar M, Sharma R, Saha T, Jain KK, Dutta S, Sharma EK (2017) Fabrication process induced changes in scattering parameters of meander type RFMEMS shunt switch. Microsyst Technol 23(12):5561–5570. https://doi.org/10.1007/s00542-017-3314-z
Siddaiah N, Prasad GRK, Sai Pravallika S, Sai Prasanna GV, Raja Gopal R (2017) Performance of analysis crab leg based RF MEMS switch for defense and aerospace applications. Int. J Eng Technol 7(1.5):71. https://doi.org/10.14419/ijet.v7i1.5.9125
Sravani KG, Narayana TL, Guha K, Rao KS (2018) Role of dielectriclayer and beam membrane in improving the performance of capacitive RFMEMS switches for Ka-band applications. Microsyst Technol. 5:1–10. https://doi.org/10.1007/s00542-018-4038-4
Yamane D, Sun W, Seita H, Kawasaki S, Fujita H, Toshiyoshi H (2011) A Ku-band dual-SPDT RF-MEMS switch by double-side SOI bulk micromachining. J Microelectromech Syst 20(5):1211–1221. https://doi.org/10.1109/jmems.2011.2162490
Yang HH, Yahiaoui A, Zareie H, Blondy P, Rebeiz GM (2014) A compact high-isolation DC-50 GHz SP4T RF MEMS switch. 2014 IEEE MTT-S International Microwave Symposium (IMS2014). https://doi.org/10.1109/mwsym.2014.6848359
Zahr AH, Blondy P, Zhang LY, Dorion C, Stefanini R, Courtade F, Pressecq F (2015) A DC-30 GHz high performance packaged RF MEMS SPDT switch. 2015 European Microwave Conference (EuMC). https://doi.org/10.1109/eumc.2015.7345938
Acknowledgements
Authors would like to thank NMDC, Department of ECE, NIT Silchar for providing necessary computational FEM tools.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Rao, K.S., Vasantha, K., Kumar, P.A. et al. Design and of analysis of SPDT Ohmic RF MEMS switch. Microsyst Technol 26, 2381–2387 (2020). https://doi.org/10.1007/s00542-020-04778-w
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-020-04778-w