Abstract
A local electroplating metal microdeposition process with a fine positioning mechanism on a nanopipette was developed. The fine positioning was achieved with a bias-modulated scanning ion conductance microscope (BM-SICM) using a single-aperture nanopipette. Using the modulated sensing signal (e.g., sinusoidal signal), the deposition by electroplating was prevented during the positioning. To demonstrate the deposition process, simple micropillars were fabricated. In a single-step deposition process, an array of copper pillars with diameters of 4.3–5.1 μm and lengths of 20 μm was fabricated. The disconnection of the pillars during the fabrication process occurred at fabrication velocities higher than 0.82 μm/s. To enable deposition without a closed-loop control, a multistep deposition process was introduced by repeating the deposition process and fine positioning steps at the growing end of the pillar. Using this multistep deposition process high-aspect pillars that were connected in 21 and 9 cycles were fabricated with the DC voltage of 0.7 and 1.0 V, respectively at a velocity of 0.82 μm/s. This simple deposition technology with BM-SICM will contribute to microfabrication technologies.
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References
Ahn BY, Duoss EB, Motala MJ, Guo X, Park S, Xiong Y, Yoon J, Nuzzo RG, Rogers JA, Lewis JA (2009) Omnidirectional printing of flexible, stretchable, and spanning silver microelectrodes. Science 323:1590–1593
An S, Jhe W (2015) Fabrication and characterization of Au nanoparticle-aggregated nanowires using nanomeniscus-induced colloidal stacking method. Nano Micro Lett 7:27–34
An S, Stambaugh C, Kim G, Lee M, Kim Y, Lee K, Jhe W (2012) Low-volume liquid delivery and nanolithography using an nanopipette combined with a quartz tuning fork-atomic force microscope. Nanoscale 4:6493
An S, Lee K, Kim B, Noh H, Kim J, Kwon S, Lee M, Hong M, Jhe W (2015) Nanopipette combined with quartz tuning fork-atomic force microscope for force spectroscopy/microscopy and liquid delivery-based nanofabrication. Rev Sci Instrum 85:033702
El-Giar EM, Said RA, Bridges GE, Thomson DJ (2000) Localized electrochemical deposition of copper microstructures. J Electrochem Soc 147:586–591
Grüter RR, Dielacher B, Hirt L, Vörös J, Zambelli T (2015) Patterning gold nanoparticles in liquid environment with high ionic strength for local fabrication of up to 100 μm long metallic interconnections. Nanotechnology 26:175301
Hansma PK, Drake B, Marti O, Gould SA, Prater CB (1989) The scanning ion-conductance microscope. Science 243:641–643
Hirt L, Ihle S, Pan Z, Dorwling-Carter L, Reiser A, Wheeler JM, Spolenak R, Vörös J, Zambelli T (2016) Template-free 3D microprinting of metals using a force-controlled nanopipette for layer-by-layer electrodeposition. Adv Mater 28:2311–2315
Hu J, Yu M (2010) Meniscus-confined three-dimensional electrodeposition for direct writing of wire bonds. Science 329:313–316
Ito S, Iwata F (2011) Nanometer-scale deposition of metal plating using a nanopipette probe in liquid condition. Jpn J Appl Phys 50:08LB15
Je JH, Kim J, Jaworski J (2017) Progression in the fountain pen approach: from 2D writing to 3D free-form micro/nanofabrication. Small 13:1600137
Kaisei K, Satoh N, Kobayshi K, Matsushige K, Yamada H (2011) Nanoscale liquid droplet deposition using ultrasmall aperture on a dynamic mode AFM tip. Nanotechnology 22:175301
Kometani R, Ishihara S (2009) Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams. Sci Technol Adv Mater 10:034501
Lessing J, Glavan AC, Walker SB, Keplinger C, Lewis JA, Whitesides GM (2014) Inkjet printing of conductive inks with high lateral resolution on omniphobic “RF paper” for paper-based electronics and MEMS. Adv Mater 26:4677–4682
Lin Y, Zhang Y, Yu M (2019) Parallel process 3D metal microprinting. Adv Mater Technol 4:1800393
Maruo S, Saeki T (2008) Femtosecond laser direct writing of metallic microstructures by photoreductions of silver nitrate in a polymer matrix. Opt Express 16:1174
Matsui S, Kaito T, Fujita J, Komuro M, Kanda K, Haruyama Y (2000) Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition. J Vac Technol B 18:3181–3184
Matsuura T, Takai T, Iwata F (2017) Local electrophoresis deposition assisted by laser trapping coupled with a spatial light modulator for three-dimensional microfabrication. Jpn J Appl Phys 556:105502
McKelvey K, Perry D, Byers JC, Colburn AW, Unwin PR (2014) Bias modulated scanning ion conductance microscopy. Anal Chem 86:3639–3646
Meister A, Gabl M, Behr P, Studer P, Vörös J, Niedermann P, Bitterli J, Polesel-Maris J, Liley M, Heinzelmann H, Zambelli T (2009) FluidFM: Combining atomic force microscopy and nanofluidics in a universal liquid delivery system for single cell applications and beyond. Nano Lett 9:2507–2591
Ming S, Dravid VP (2001) Colored ink dip-pen nanolithography. Appl Phys Lett 80:4434–4436
Momotenko D, Page A, Adobes-Vidal M, Unwin PR (2016) Write-read 3D patterning with a dual-channel nanopipette. ACS Nano 10:8871–8878
Pique A, Auyeung RCY, Kim H, Metkus KM, Mathews SA (2008) Digital microfabrication by laser decal transfer. J Laser Micro Nanoeng 3:163–169
Takai T, Nakao H, Iwata F (2014) Tree-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique. Opt Express 22:28109
Tanaka T, Ishikawa A, Kawata S (2006) Two-photon-induced reduction of metal ions for fabrication three-dimensional electrically conductive metallic microstructure. Appl Phys Lett 88:081107
Yoshioka M, Mizutani Y, Ushiki T, Nakazawa K, Iwata F (2019) Micropillar fabrication based on local electrophoretic deposition using a scanning ion conductance microscope with a theta nanopipette. Jpn J Appl Phys 58:046503
Zenou M, Kotler Z (2016) Printing of metallic 3D micro-objects by laser induced forward transfer. Opt Express 24:1431
Zhang P, Aydemir N, Alkaisi M, Williams DE, Travas-Sejdic J (2018) Direct writing and characterization of three-dimensional conducting polymer PEDOT arrays. ACS Appl Mater Interfaces 10:11888–11895
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This study was partly supported by Grant-in-Aid for Scientific Research (No. 16K14131) from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.
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Nakazawa, K., Yoshioka, M., Mizutani, Y. et al. Local electroplating deposition for free-standing micropillars using a bias-modulated scanning ion conductance microscope. Microsyst Technol 26, 1333–1342 (2020). https://doi.org/10.1007/s00542-019-04665-z
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DOI: https://doi.org/10.1007/s00542-019-04665-z