Abstract
Hot embossing is a novel technique for the cost-effective production of micro-parts. Misalignment between the top and bottom surfaces of a product that has double-sided microstructures reduces its functions. Most solutions involve repairing or reproducing the embossing mold, which increases the cost for the molding process. This study proposes a hybrid alignment platform that allows accurate positioning and angular alignment for the embossing processes. The hybrid alignment platform includes two units. The upper unit allows angular adjustment using a precision rotary table. The lower unit allows positional adjustment using two orthogonal micrometers. Calibration tests are conducted for a series of adjustment steps along the X, Y and C axis. Only one alignment step is necessary for each axis. The alignment platform allows rapid positioning and increases replicability. The hybrid mold adjustment platform is used to resolve a problem with gear misalignment and the problem of eccentricity in the production of micro-gears is effectively resolved.
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig1_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig2_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig3_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig4_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig5_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig6_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig7_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig8_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig9_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig10_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig11_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig12_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig13_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig14_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig15_HTML.jpg)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1007%2Fs00542-019-04563-4/MediaObjects/542_2019_4563_Fig16_HTML.jpg)
Similar content being viewed by others
References
Becker H, Heim U (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sens Actuators 83:130–135
Heckele M (1998) Hot embossing-the molding technique for microstructures. Microsyst Technol 4:122–124
Itagaki H, Tsutsumi M (2014) Control system design of a linear motor feed drive system using virtual friction. Precis Eng 38:237–248
Liu CH, Jywe WY (2004) A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine. Int J Mach Tools Manuf 44(2004):365–371
Ong NS, Koh YH, Fu YQ (2002) Microlens array produced using hot embossing process. Microelectron Eng 60:365
Schift H, David C, Gabriel J, Gobrecht J, Heyderman LJ, Kaiser W, Koppel S, Scadella L (2000) Nanoreplication in polymers using hot embossing and injection molding. Microelectron Eng 53:171
Shimizua Y, Penga Y, Kanekoa J, Azumaa T, Itoa S, Gaoa W, Lub TF (2013) Design and construction of the motion mechanism of an XY micro-stage for precision positioning. Sens Actuators A 201:395–406
Wimberger-Friedl R (2000) Injection molding of sub-μm grating optical elements. J Inject Molding Technol 4:78–83
Wu C-H, Chen W-S (2006) Injection molding and injection compression molding of three-beam grating of DVD pickup lens. Sens Actuators A 125:367–375
Wu CH, Kuo HC (2007) Parametric study of injection molding and hot embossing in polymer microfabrication. J Mech Sci Technol 21(10):1338
Yao D, Kim B (2002a) Simulation of the filling process in micro channels for polymeric materials. J Micromech Microeng 12:604–610
Yao D, Kim B (2002b) Injection molding high aspect ratio microfeatures. J Inject Molding Technol 6:11–17
Acknowledgements
This work was supported by the National Science Council under NSC grant NSC-102-2221-E-151-019.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Wu, CH., Chiu, CH. & Chen, YH. Design and application of a hybrid alignment platform for a double-sided hot embossing process. Microsyst Technol 26, 721–730 (2020). https://doi.org/10.1007/s00542-019-04563-4
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-019-04563-4