Skip to main content
SpringerLink
Log in

Experimental verification of near-field lattice spectroscopy

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Near-field lattice spectroscopy has shown that the structure information for a lattice or periodic pattern can be obtained by measuring the diffracted spectrum of a broad-band light source at one spatial position. This technique is verified experimentally using a transmitting grating, supercontinuum white light laser, and a reflective concave mirror. The calculated grating’s period from the detected lattice spectroscopy is close to the measured period with an optical microscope, which demonstrates the validity and feasibility of this scheme.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  • Frazao O, Santos JL, Araujo FM, Ferreira LA (2009) Optical sensing with photonic crystal fibers. Laser Photonics Rev 2:449–459

    Article  Google Scholar 

  • Han P (2015) Spectra restoration of a transmissive periodic structure in near-field diffraction (Talbot Spectra). J Opt Soc Am A 32:1076–1083

    Article  Google Scholar 

  • Han P (2018) Spatial–spectral correspondence relationship for mono–polychromatic light diffraction. In: Visser TD (ed) Progress in optics, vol 63. Elsevier, Amsterdam, pp 33–87 (ISBN: 978-0-444-64117-5)

    Google Scholar 

  • Hsieh TH, Han P (2018) Using interference spectrum as short-range absolute rangefinder with fiber and wideband source. Meas Sci Technol 29:065006. https://doi.org/10.1088/1361-6501/aab13f

    Article  Google Scholar 

  • Keen DA (2014) Crystallography and physics. Phys Scr 89:128003

    Article  Google Scholar 

  • Lu Z, Wei P, Wang C, Jing J, Tan J, Zhao X (2016) Two-degree-of-freedom displacement measurement system based on double diffraction gratings. Meas Sci Technol 27:074012

    Article  Google Scholar 

  • Su XY, Zhang QC (2010) Dynamic 3-D shape measurement method: a review. Opt Lasers Eng 48:191–204

    Article  Google Scholar 

  • Available at: https://www.keyence.com/products/measure/spectral/si-f/index.jsp. Accessed 11 June 2019

  • Han P (2009) Lattice spectroscopy. Opt Lett 34:1303–1305

    Article  Google Scholar 

  • Han P (2011) Near field lattice spectroscopy with a reflective confocal configuration. Appl Phys Express 4:022401

    Article  Google Scholar 

  • Hecht E (2002) Optics, 4th edn. Addison Wesley, San Francisco, p 477

    Google Scholar 

  • Iizuka K: Engineering Optics (Kyoritsu Shuppan, Tokyo, 1983) 2nd ed. p 87

  • Kandpal HC (2001) Experimental observation of the phenomenon of spectral switch. J Opt A: Pure Appl Opt 3:296–299

    Article  Google Scholar 

  • Pu J, Zhang H, Nemoto S (1999) Spectral shifts and spectral switches of partially coherent light passing through an aperture. Opt Commun 162:57–63

    Article  Google Scholar 

  • Wu H, Zhang F, Meng F, Liu T, Li J, Pan L, Qu X (2016) Absolute distance measurement in a combined dispersive interferometer using a femtosecond pulse laser Meas. Sci Technol 27(015202):12

    Google Scholar 

Download references

Acknowledgements

This study was supported by the National Chung Hsing University and National Taiwan Ocean University, Taiwan, R.O.C. The author also would like to thank his colleagues for useful suggestions. This work was also supported by the Ministry of Science and Technology of R.O.C. under contract Nos. MOST-104-2221-E-005-069-MY3, MOST-106-2622-E-005-007-CC3 and MOST 107-2622-E-019-004 -CC3.

Author information

Authors and Affiliations

  1. Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    Pin Han, Hsun-Ching Hsu, Hsu-Wen Cheng & Tsung-Han Hsieh

  2. Department of Electro-Optical Engineering, National United University, Miaoli, 360, Taiwan

    Cheng-Ling Lee

  3. Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung, 202, Taiwan

    Hung-Bin Lee

Authors
  1. Pin Han
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Hsun-Ching Hsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hsu-Wen Cheng
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Tsung-Han Hsieh
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Cheng-Ling Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Hung-Bin Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Hung-Bin Lee.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Han, P., Hsu, HC., Cheng, HW. et al. Experimental verification of near-field lattice spectroscopy. Microsyst Technol 28, 179–185 (2022). https://doi.org/10.1007/s00542-019-04562-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-019-04562-5

Search

Navigation