Abstract
In this paper, we report the effect of geometric parameters by calculating the capacitance scale factor of micromachined vibrating wheel on gimbal gyroscope with various shapes and mass conditions. The behavior of capacitance for vibratory torsional gyroscope with various shapes and mass conditions is investigated using MEMS+™. The structure dimensions of the gyroscope are optimized by matching frequencies in driving and sensing modes. The scale factor and linearity error extracted by calculated capacitance have been changed with various shapes condition unless the area of sensing electrodes and the mass of the gyroscope have been fixed. The mass ratio of gimbal and wheel structure is varied to minimize the linearity error.
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Acknowledgements
This project is part of the implementation plan for the United Arab Emirates Space Agency’s ST&I Roadmap and it falls under Level 1 ST&I area of “Science Instruments, Observatories and Sensor Systems”, level 2 “In-situ Instruments and Sensors” and level 3 “In-situ (Other)—Inertial Measurement Unit under the Initiative of 4.b.2. Communication, Navigation, and Orbital Debris Tracking and Characterization”. This work is funded by the United Arab Emirates Space Agency, Space Missions’ Science and Technology Directorate, Reference M06&15-2016-002.
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JSL and DSC conceived and designed the experiments; JSL, MM, HA, IT, BHA, WAG simulated the experiments and analyzed the data; JSL, BHA and DSC wrote the paper.
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Lee, J.S., An, B.H., Mansouri, M. et al. MEMS vibrating wheel on gimbal gyroscope with high scale factor. Microsyst Technol 25, 4645–4650 (2019). https://doi.org/10.1007/s00542-019-04508-x
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DOI: https://doi.org/10.1007/s00542-019-04508-x