Driving and detection system of vibrating piezoelectric gyroscope at atmospheric pressure for multi-axial inertia sensor
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We developed a driving and sensing system for a multi-axial inertial sensor that operates at atmospheric pressure using vibrating piezoelectric gyroscope sensors. We developed driving circuit modules with self-oscillation and an automatic gain controller and a synchronous detection circuit for demodulation of the sensing signals. The self-oscillation function was tested using a charging amplifier and phase shifter. Self-oscillation works by detecting a displacement signal differentially, adjusting it by a phase of π/2, and sending it to the oscillation signal generator. The stop time was improved from 15 to 3 ms using an inverse driving module. The driving circuit maintained stable oscillation throughout operation of the gyroscope because the automatic gain controller was added to the self-oscillation loop. A velocity demodulation method was implemented for the sensor to demodulate the outputs of angular velocities; this is more beneficial for decoupled vibrating gyroscopes compared to displacement demodulation. The response under angular rate was 1°/s in the x- and y-directions, and the measurement sensitivity was 17.2 µV/(°/s). The measured Q of the fabricated piezoelectric gyroscope was maintained stably at 400–500 at normal pressure.
This paper was supported by Education and Research promotion program of KoreaTech in 2018. This research was also supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (no. NRF-2015R1D1A1A0105 9060 and no. NRF-2016R1D1A3A039 19627). This work was supported by the Korea Institute of Energy Technology Evaluation and Planning(KETEP) and the Ministry of Trade, Industry & Energy(MOTIE) of the Republic of Korea (no. 20194010201760).
- Garcia-Quinchía A, Martin E, Ferrer C (2009) A system-on-chip (SOC) platform to integrated inertial navigation systems & GPS. In: Proceedings of IEEE international symposium on the industrial electronicsGoogle Scholar
- Iga Y, Kanda K, Fujita T, Higuchi K, Maenaka K (2010) A design and fabrication of MEMS gyroscope using PZT thin films. In: Proceeding of the 2010 world automation congressGoogle Scholar
- Nilsson JO, Skog I (2016) Inertial sensor arrays-A literature review. In: Proceedings of the 2016 European navigation conference (ENC)Google Scholar
- Okada K (1998) Ultiaxial acceleration sensor using a piezoelectric element. US005850040AGoogle Scholar
- Okada K (2002) Angular velocity sensor. US006367326B1Google Scholar
- Okada K, Matsu Y, Taniguchi N, Itano H (2003) Development of 3-axis gyro-sensor using piezoelectric element. In: Proceedings of the 20th sensor symposiumGoogle Scholar
- Okada K, Kakutani T, Itano H, Matsu Y, Sugiyama S (2004) Development of 6-axis motion sensors using piezoelectric elements. In: Proceedings of the 21st sensor symposiumGoogle Scholar
- Shkel AM (2001) Micromachined gyroscopes: challenges, design solutions, and opportunities. In: Proceedings of the smart structures and materials 2001: smart electronics and MEMSGoogle Scholar
- Yang J (2005a) Piezoelectric devices. In: An introduction to the theory of piezoelectricity. Springer, Boston, pp 235–276Google Scholar
- Yang J, Fang H, Jiang Q (2000) Analysis of a few piezoelectric gyroscopes. In: Proceedings of the 2000 IEEE/EIA international frequency control symposium and exhibitionGoogle Scholar