Abstract
A thin film was coated onto the top of the heating electrodes to reduce the power consumption and improve the uniformity of temperature distribution. Finite element simulation software COMSOL was used to simulate the effect of coating materials and dependence of thicknesses of the coating film on the power consumption of the heating plate. On the basis of simulation, the temperature distribution of different heating plates was measured using infrared thermography. Experiments have showed that the power consumption of the heating plate can be significantly reduced and the temperature uniformity is promoted with adding the coating film on the top of the heating electrodes. The response of the gas sensor based on PdO-WO3 nanoparticles was characterized with analyte of acetone. It was found that the addition of the coating film could enhance the response to acetone. In addition, the response speed of sensors was investigated with coating films and the results indicated that with the coating film sensor response speed became faster.
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Acknowledgements
This study was supported by the Natural Science Foundation of Hebei (Grant NO. F2016202214), Hebei Province Foundation for Returned oversea scholars (Grant NO. CL201710), and National Natural Science Foundation of China (Grant NO. 61501167).
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Wu, Y., Yuan, L., Hua, Z. et al. Design and optimization of heating plate for metal oxide semiconductor gas sensor. Microsyst Technol 25, 3511–3519 (2019). https://doi.org/10.1007/s00542-019-04318-1
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DOI: https://doi.org/10.1007/s00542-019-04318-1