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A flexure motion stage system for light beam control

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Abstract

This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.

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Acknowledgements

Mr. Tim Power and Mr. Michael O’Shea in School of Engineering at University College Cork are greatly appreciated for their excellent work in fabricating the flexure mechanism and assembly the testing rig.

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Authors and Affiliations

  1. School of Engineering-Electrical and Electronic Engineering, University College Cork, Cork, Ireland

    Mehdi Riza & Guangbo Hao

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  1. Mehdi Riza
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  2. Guangbo Hao
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Correspondence to Guangbo Hao.

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Appendix 1: Other actuation methods for flexure motion stages

Appendix 1: Other actuation methods for flexure motion stages

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Riza, M., Hao, G. A flexure motion stage system for light beam control. Microsyst Technol 25, 3185–3191 (2019). https://doi.org/10.1007/s00542-018-4168-8

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  • DOI: https://doi.org/10.1007/s00542-018-4168-8

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