Microsystem Technologies

, Volume 25, Issue 6, pp 2191–2195 | Cite as

RF MEMS packaged switch evaluation tests up to 25 GHz

  • Evgeny A. SavinEmail author
  • Elena N. Bochkova
  • Roman V. Kirtaev
  • Jacopo Iannacci
Technical Paper


This article presents the results of the series of experimental tests of a packaged RF MEMS switch manufactured as a chip on a silicon substrate in the Center for Materials and Microsystems of Fondazione Bruno Kessler. Experiments have been performed up to 25 GHz and included S-parameters check in different operation and environmental conditions, including variation of input power, ambient temperature and number of switching cycles. Presented RF MEMS SPST switch is a basic element of more complex reconfigurable networks such as SPxT switches, phase shifters, power attenuators etc.



This work has been supported by the Ministry of Education and Science of the Russian Federation under the Federal target program “Research and Development in Priority Directions of the Russian Science and Technology Complex in 2014–2020”; contract no. 14.579.21.0137; unique project identifier RFMEFI57916X0137. Experiments have been performed using the equipment of MIPT Shared Facilities Centre.


  1. Blondy P et al (2004) Dielectric less capacitive MEMS switches. Microw Symp Dig I IEEE MTT-S Int 2:573–576Google Scholar
  2. Browne J (2018) What role will millimeter waves play in 5G wireless systems? Microwaves and RF. Accessed 01 July 2018
  3. Chen C et al (2017) Finite large antenna arrays for Massive MIMO: characterization and system impact. IEEE Trans Antenna Propag 65(12):6712–6720CrossRefGoogle Scholar
  4. Giacomozzi F et al (2011) A flexible technology platform for the fabrication of RF-MEMS devices. In: Semiconductor conference (CAS), 2011 international, pp 155–158Google Scholar
  5. Giacomozzi F et al (2015) RF-MEMS packaging by using quartz caps and epoxy polymers. Microsyst Technol 21(9):1941–1948CrossRefGoogle Scholar
  6. Goldsmith C et al (2008) Understanding and improving longevity in RF MEMS capacitive switches. Proc SPIE 6884:688403CrossRefGoogle Scholar
  7. Iannacci J et al (2010) A MEMS-based wide-band multi-state power attenuator for radio frequency and microwave applications. NSTI Nanotech 2:328–331Google Scholar
  8. Iannacci J (2013) Practical guide to RF-MEMS. Wiley-VCH, WeinheimCrossRefGoogle Scholar
  9. Kingsley N, Bhattacharya SK, Papapolymerou J (2008) Moisture lifetime testing of RF MEMS switches packaged in liquid crystal polymer. IEEE Trans Compon Packag Technol 31(2):345–350CrossRefGoogle Scholar
  10. Kuenzig T, Iannacci J, Schrag G, Wachutka G (2012) Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch. In: 2012 13th international thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems, Cascais, pp 1/7–7/7.
  11. Larsson EG et al (2014) Massive MIMO for next generation wireless systems. IEEE Commun Mag 52(5):186–195CrossRefGoogle Scholar
  12. Lee D et al (2012) Coordinated multipoint transmission and reception in LTE-advanced: deployment scenarios and operational challenges. IEEE Commun Mag 50(2):148–155CrossRefGoogle Scholar
  13. Molisch AF et al (2017) Hybrid beamforming for massive MIMO—a survey. IEEE Commun Mag 55(9):134–141CrossRefGoogle Scholar
  14. Rappaport TS et al (2013) Millimeter wave mobile communications for 5G cellular: it will work!. IEEE Access 1:335–349CrossRefGoogle Scholar
  15. Rebeiz G (2003) RF MEMS theory, design, and technology. Wiley-Interscience, New YorkGoogle Scholar
  16. Savin EA, Chadin KA, Kirtaev RV (2018a) Design and manufacturing of X-band RF MEMS switches. Microsyst Technol 24(6):2783–2788CrossRefGoogle Scholar
  17. Savin EA et al (2018b) Design of a packaging-friendly double-topology RF MEMS switch for space applications. Microsyst Technol. Google Scholar
  18. Schwarz S, Rupp M (2014) Exploring coordinated multipoint beamforming strategies for 5G cellular. IEEE Access 2:930–946CrossRefGoogle Scholar
  19. Sharma AK et al (2015) A Ku band 5 bit MEMS phase shifter for active electronically steerable phased array applications. J Micromech Microeng 25:035014CrossRefGoogle Scholar
  20. Sun S, Rappaport TS, Shafi M (2018) Hybrid beamforming for 5G millimeter-wave multi-cell networks. In: Proceedings of the IEEE conference on computer communications workshops, Honolulu, HI, USAGoogle Scholar
  21. Yang HJ et al (2017) Opportunistic downlink interference alignment for multi-cell MIMO networks. IEEE Trans Wirel Commun 16(3):1533–1548CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Bazovye Tekhnologii, LLCMoscowRussia
  2. 2.Fondazione Bruno KesslerTrentoItaly

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