Skip to main content
SpringerLink
Log in

Lithography-induced hydrophobic surfaces of silicon wafers with excellent anisotropic wetting properties

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

In recent years, hydrophobic surfaces have attracted more and more attentions from many researchers. In this paper, we comprehensively discussed the effects of specific parameters of microstructures on the wetting properties by using the theoretical models, the effects of microstructures on two-dimensional anisotropic properties and the water droplet impact experiment. Firstly, the relationships between the CAs and variable parameters were explored after the formula derivation for three various patterns. Then three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of microstructures (including LWD parameters and interval parameters) on surface wettability were studied based on the theoretical research. After that, the effects of microstructures on two-dimensional anisotropic properties were also studied. Finally, the water droplet impact experiment was carried out and the viscoelastic properties were simply investigated. Our research proposed a potential method for fabricating hydrophobic surfaces with excellent anisotropic properties. This method may be widely used in a variety of academic and industrial applications in the future.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  • Arifvianto B, Mahardika M, Dewo P (2011) Effect of surface mechanical attrition treatment (SMAT) on microhardness, surface roughness and wettability of AISI 316L. Mater Chem Phys 125:418–426

    Article  Google Scholar 

  • Barthlott W, Neinhuis C (1997) Purity of the sacred lotus, or escape from contamination in biological surfaces. Planta 202:1–8

    Article  Google Scholar 

  • Barthlott W, Schimmel T, Wiersch S et al (2010) The salvinia paradox: superhydrophobic surfaces with hydrophilic pins for air retention under water. Adv Mater 22:2325–2328

    Article  Google Scholar 

  • Bixler GD, Bhushan BF (2013) Fluid drag reduction and efficient self-cleaning with rice leaf and butterfly wing bioinspired surfaces. Nanoscale 5:7685–7710

    Article  Google Scholar 

  • Bizi-bandoki P, Valette S, Audouard E (2013) Time dependency of the hydrophilicity and hydrophobicity of metallic alloys subjected to femtosecond laser irradiations. Appl Surf Sci 273:399–407

    Article  Google Scholar 

  • Cai Y, Lin L, Xue Z et al (2014) Filefish inspired surface design for anisotropic underwater oleophobicity. Adv Funct Mater 24:809–816

    Article  Google Scholar 

  • Cassie A, Baxter S (1994) Wettability of porous surfaces. Trans Faraday Soc 40:546–551

    Article  Google Scholar 

  • Chen F, Zhang D, Yang Q (2010) Anisotropic wetting on microstrips surface fabricated by femtosecond laser. Langmuir 27:359–365

    Article  Google Scholar 

  • Doll K, Fadeeva E, Stumpp NS (2016) Reduced bacterial adhesion on titanium surfaces micro-structured by ultra-short pulsed laser ablation. BioNanoMaterials 17:1–2

    Article  Google Scholar 

  • Feng L, Li S, Li Y et al (2002) Super-hydrophobic surfaces: from natural to artificial. Adv Mater 14:1857–1860

    Article  Google Scholar 

  • Feng X, Gao Q, Wu X et al (2007) Superior water repellency of water strider legs with hierarchical structures: experiments and analysis. Langmuir 23:4892–4896

    Article  Google Scholar 

  • Gao XY, Guo ZG (2017) Biomimetic superhydrophobic surfaces with transition metals and their oxides: a review. J Bionic Eng 14:401–439

    Article  Google Scholar 

  • Gao X, Yan X, Yao X et al (2010) The dry-style antifogging properties of mosquito compound eyes and artificial analogues prepared by soft lithography. Adv Mater 19:2213–2217

    Article  Google Scholar 

  • He Y, Jiang CY, Yin HX (2011) Tailoring the wettability of patterned silicon sur-faces with dual-scale pillars: from hydrophilicity to superhydrophobicity. Appl Surf Sci 257:7689–7692

    Article  Google Scholar 

  • Kahng B, Jeong H, Barabasi AL (2001) Quantum dot and hole formation in sputter erosion. Appl Phys Lett 78:805–807

    Article  Google Scholar 

  • Kim T, Tahk D, Lee HH (2009) Wettability-Controllable super water- and moderately oil-repellent surface fabricated by wet chemical etching. Langmuir 25:6576–6579

    Article  Google Scholar 

  • Li H, Yu S, Han X (2016) A stable hierarchical superhydrophobic coating on pipeline steel surface with self-cleaning, anticorrosion, and anti-scaling properties. Colloid Surf A—Physicochem Eng Asp 503:43–52

    Article  Google Scholar 

  • Liu K, Du J, Wu J et al (2012) Superhydrophobic gecko feet with high adhesive forces towards water and their bio-inspired materials. Nanoscale 4:768–772

    Article  Google Scholar 

  • Vasilii B, Valentina M, Artem K et al (2018) Hydrophilic/hydrophobic surface modification impact on colloid lithography: schottky-like defects, dislocation, and ideal distribution. Appl Surf Sci 6:443–448

    Google Scholar 

  • Wang G, Guo Z, Liu W (2014) Interfacial effects of superhydrophobic plant surfaces: a review. J Bionic Eng 11:325–345

    Article  Google Scholar 

  • Wenzel RN (1936) Resistance of solid surfaces to wetting by water. J Ind Eng Chem 28:988–994

    Article  Google Scholar 

  • Yang XM, Zhong ZW, Diallo EM et al (2014) Silicon wafer wettability and aging behaviors: impact on gold thin-film morphology. Math Sci Semicond Proc 26:25–32

    Article  Google Scholar 

  • Yong J, Yang Q, Chen F et al (2014) A simple way to achieve superhydrophobicity, controllable water adhesion, anisotropic sliding, and anisotropic wetting based on femtosecond-laser-induced line-patterned surfaces. J Mater Chem A 2:5499–5507

    Article  Google Scholar 

  • Young T (1805) An essay on the cohesion of fluids. Philos Trans R Soc A 95:65–87

    Article  Google Scholar 

  • Zhang G, Zhang J, Xie G et al (2006) Cicada wings: a stamp from nature for nanoimprint lithography. Small 2:1440–1443

    Article  Google Scholar 

  • Zhang X, Zhang J, Ren Z et al (2009) Morphology and wettability control of silicon cone arrays using colloidal lithography. Langmuir 25:7375–7382

    Article  Google Scholar 

  • Zhang D, Chen F, Yang Q et al (2011) Mutual wetting transition between isotropic and anisotropic on directional structures fabricated by femotosecond laser. Soft Matter 7:8337–8342

    Article  Google Scholar 

  • Zheng Y, Gao X, Jiang L et al (2007) Directional adhesion of superhydrophobic butterfly wings. Soft Matter 3:178–182

    Article  Google Scholar 

  • Zhu JJ, Tian YL, Yang CJ et al (2017a) Lithography-induced wettability Changes of Silicon. In: Shanghai: 2017 IEEE International Conference of Manipulation, Manufacturing and Measurement on the Nanoscale (3 M-NANO)

  • Zhu JJ, Tian YL, Yang CJ, Liu XP (2017b) Low-cost and fast fabrication of the ultrasonic embossing on polyethylene terephthalate (PET) films using laser processed molds. Microsyst Technol 23:5653–5668

    Article  Google Scholar 

  • Zhu JJ, Tian YL, Liu XP (2018) Rapid fabrication of super-hydrophobic surfaces of silicon wafers with excellent anisotropic wetting. Microsyst Technol 24:1–7

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by China-EU H2020 International Science and Technology Cooperation Project (FabSurfWAR Nos. 2016YFE0112100 and 644971) and National Natural Science Foundations of China [Nos. 51405333, 51675371, 51675376 and 51675367]. The authors are particularly grateful to Tianjin University and Xian Jiaotong University for the technical support. Jiajing Zhu wish to gratefully acknowledge the financial support by China Scholarship Council.

Author information

Authors and Affiliations

  1. School of Engineering, University of Warwick, Coventry, CV4 7AL, UK

    Jiajing Zhu, Yanling Tian & Xianping Liu

  2. Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, Tianjin, 300072, China

    Yanling Tian & Chengjuan Yang

Authors
  1. Jiajing Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yanling Tian
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Xianping Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Chengjuan Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Jiajing Zhu.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhu, J., Tian, Y., Liu, X. et al. Lithography-induced hydrophobic surfaces of silicon wafers with excellent anisotropic wetting properties. Microsyst Technol 25, 735–745 (2019). https://doi.org/10.1007/s00542-018-4010-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-018-4010-3

Search

Navigation