Abstract
We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating. The identification algorithm is a continuous-time closed-loop identification algorithm based on the instrumental variable principle.
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Acknowledgements
The project was supported by the French and Japanese bilateral exchange program PRC JSPS-CNRS and Normandy C2-MTM Project. Micro-fabrication process was done in the Takeda clean room at the University of Tokyo, partially financed by the MEXT Nanotechnology Platform.
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Pouliquen, M., Denoual, M., Jorel, C. et al. Self-identification algorithm for zeolite-based thermal capacity gas sensor. Microsyst Technol 28, 1313–1319 (2022). https://doi.org/10.1007/s00542-018-3883-5
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DOI: https://doi.org/10.1007/s00542-018-3883-5