Self-identification algorithm for zeolite-based thermal capacity gas sensor
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We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating. The identification algorithm is a continuous-time closed-loop identification algorithm based on the instrumental variable principle.
The project was supported by the French and Japanese bilateral exchange program PRC JSPS-CNRS and Normandy C2-MTM Project. Micro-fabrication process was done in the Takeda clean room at the University of Tokyo, partially financed by the MEXT Nanotechnology Platform.
- Denoual M, Pouliquen M, Robbes D, de Sagazan O, Grand J, Awala H, Mintova S, Inoue S, Mita-Tixier A, Mita Y (2016) Microfabricated test structures for thermal gas sensors. In: Proc. of ICMTSGoogle Scholar